Optoelectronic semiconductor chip and method for producing an optoelectronic semiconductor chip
View Patent ↗An optoelectronic semiconductor chip includes a semiconductor layer sequence. The semiconductor layer sequence contains at least one active layer for generating primary radiation. In addition, the semiconductor layer sequence includes a plurality of conversion layers, the conversion layers being designed to absorb the primary radiation at least partially and to convert it into secondary radiation of a longer wavelength than the primary radiation. Furthermore the semiconductor layer sequence comprises a roughening which extends at least into the conversion layers.
1. A method of producing an optoelectronic semiconductor chip comprising:
providing a growth substrate;
growing a semiconductor layer sequence epitaxially on the growth substrate, the semiconductor layer sequence comprising at least one active layer that generates primary radiation and a plurality of conversion layers which at least in part absorb the primary radiation and convert it into secondary radiation of a longer wavelength than the primary radiation;
forming a roughened portion which extends at least into one of the conversion layers, the material of at least one conversion layer being removed in places by roughening; and
completing the semiconductor chip,
wherein a color location of radiation emitted by the semiconductor chip is altered by the roughening,
wherein the roughened portion is of a random structure,
the semiconductor layer sequence is formed by a single layer sequence grown as a whole and which comprises both the at least one active layer and the conversion layers which are monolithically integrated in the semiconductor layer sequence, and
the semiconductor layer sequence emits radiation at least temporarily during creation of the roughened portion and the color location of the radiation emitted by the semiconductor layer sequence is measured at least temporarily.
2. The method according to claim 1 , wherein a sum of a c x value and a c y value of the color location of the radiation emitted by the semiconductor chip is reduced in a CIE standard chromaticity diagram by at least 0.05 units during roughening.
3. The method according to claim 1 , wherein the growth substrate is removed from the semiconductor layer sequence before roughening, the semiconductor chip is electrically contacted before the roughening, and the semiconductor chip is electrically operated periodically during roughening.