IP Library Granted Patent US 8,748,831
Granted Patent B2
US 8,748,831 · App. 13/323,288 · Granted Jun 10, 2014

Flat panel imagers with pixel separation and method of manufacturing the same

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,748,831
App. No.
13/323,288
Granted
Jun 10, 2014
Kind
B2
Abstract

A method of making at least a portion of an imager includes obtaining an imager component having a substrate layer, a photo-sensitive layer, and a first image element and a second image element disposed between the substrate layer and the photo-sensitive layer, and delivering ultraviolet light through the substrate layer and between the first image element and the second image element to reach the photo-sensitive layer, wherein the ultraviolet light interacts with a portion of the photo-sensitive layer to form a photo-resist structure.

Claims (40)

1. An imager having at least a portion that is formed by:

obtaining an imager component having a substrate layer, a photo-sensitive layer, and a first image element and a second image element disposed between the substrate layer and the photo-sensitive layer;

delivering ultraviolet light through the substrate layer and between the first image element and the second image element to reach the photo-sensitive layer, wherein the ultraviolet light interacts with a portion of the photo-sensitive layer to form a photo-resist structure;

removing a part of the photo-sensitive layer that does not receive the ultraviolet light to create a space; and

disposing a scintillating material in the space.

2. The imager of claim 1 , wherein the act of delivering ultraviolet light comprises using the first image element and the second image element as a mask.

3. The imager of claim 1 , wherein the substrate layer is transparent to ultraviolet light.

4. The imager of claim 1 , wherein the scintillating material is above the first image element and is at least partially confined by the photo-resist structure.

5. The imager of claim 1 , wherein the imager component further includes an electrical conductor disposed between the first image element and the second image element.

6. The imager of claim 5 , wherein the ultraviolet light is delivered through a first region between the first image element and the electrical conductor, and through a second region between the electrical conductor and the second image element.

7. The imager of claim 1 , wherein the photo-sensitive layer comprises a negative photo-sensitive material.

8. The imager of claim 1 , wherein the photo-sensitive layer comprises a positive photo-sensitive material.

9. The imager of claim 1 , wherein the photo-sensitive layer comprises SU-8.

10. The imager of claim 1 , wherein the photo- sensitive layer comprises NR9-8000.

11. The imager of claim 1 , wherein the photo- sensitive layer comprises AZ PLP-100.

12. The imager of claim 1 , wherein the photo-resist structure has a width, and a height measured in a direction that is perpendicular to a plane of the imager that is at least half the width.

13. The imager of claim 1 , wherein the first image element comprises a first photodiode, and the second image element comprises a second photodiode.

14. An imager having at least a portion that is formed by:

obtaining an imager component having a substrate layer, a photo-sensitive layer, and a first image element and a second image element disposed between the substrate layer and the photo-sensitive layer; and

delivering ultraviolet light through the substrate layer and between the first image element and the second image element to reach the photo-sensitive layer;

wherein the ultraviolet light interacts with a portion of the photo-sensitive layer to form a photo-resist structure; and

wherein the photo-sensitive layer includes a filler that reflects a first part of a light spectrum while being transparent to a second part of the light spectrum.

15. The imager of claim 14 , wherein the first part of the light spectrum comprises green light.

16. The imager of claim 14 , wherein the second part of the light spectrum comprises ultraviolet light.

17. An imager, comprising:

a substrate;

an imaging layer above the substrate, wherein the imaging layer comprises a first image element and a second image element; and

a scintillating layer above the imaging layer, wherein the scintillating layer includes a plurality of walls that are in a grid configuration, and a plurality of scintillating blocks that are disposed in respective spaces between the walls;

wherein the walls are photo-resist structures.

18. The imager of claim 17 , wherein at least two of the walls have a unity configuration.

19. The imager of claim 17 , wherein one of the walls has a width, and a height measured in a direction that is perpendicular to a plane of the imager that is at least half the width.

20. The imager of claim 17 , wherein one of the walls is configured to absorb a part of a light spectrum.

21. The imager of claim 17 , wherein the first image element comprises a first photodiode, and the second image element comprises a second photodiode.

22. An imager, comprising:

a substrate;

an imaging layer above the substrate, wherein the imaging layer comprises a first image element and a second image element; and

a scintillating layer above the imaging layer, wherein the scintillating layer includes a plurality of walls that are in a grid configuration, and a plurality of scintillating blocks that are disposed in respective spaces between the walls;

wherein one of the walls is configured to reflect a first part of a light spectrum while being transparent to a second part of the light spectrum.

23. The imager of claim 22 , wherein the first part of the light spectrum comprises green light.

24. The imager of claim 22 , wherein the second part of the light spectrum comprises ultraviolet light.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Mar 29, 2024
From: BANK OF AMERICA, N.A.
To: VAREX IMAGING CORPORATION
Reel/Frame 066950/0001 →
SECURITY INTEREST Recorded Oct 1, 2020
From: VAREX IMAGING CORPORATION
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 054240/0123 →
SECURITY INTEREST Recorded Sep 30, 2020
From: VAREX IMAGING CORPORATION
To: BANK OF AMERICA, N.A., AS AGENT
Reel/Frame 053945/0137 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 28, 2017
From: VARIAN MEDICAL SYSTEMS, INC.
To: VAREX IMAGING CORPORATION
Reel/Frame 041602/0309 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 19, 2012
From: MOLLOV, IVAN P
To: VARIAN MEDICAL SYSTEMS, INC.
Reel/Frame 027563/0391 →