Protective film mainly composed of a tetrahedral amorphous carbon film and a magnetic recording medium having the protective film
View Patent ↗A protective film is disclosed that is mainly composed of a tetrahedral amorphous carbon (ta-C film) that is denser than a DLC film formed by a plasma CVD method and containing aggregate particles so reduced as to a necessary and sufficient level, to provide a method of manufacturing such a protective film, and to provide a magnetic recording medium comprising such a protective film. The film is mainly composed of a ta-C film formed by a filtered cathodic arc method using a cathode target of glass state carbon. A magnetic recording medium is disclosed which includes a substrate, a magnetic recording layer, and the protective film mainly composed of a ta-C film.
1. A method of manufacturing a protective film for a magnetic recording medium, the method comprising steps of:
placing a target substrate for film deposition in a film deposition chamber;
generating a plasma that contains carbon ions by arc discharge between an anode and a cathode target composed of glass state carbon, wherein the glass state carbon has a structure in which fine hexagonal mesh structures of graphite are randomly combined by sp3-like bonding;
transporting only carbon ions through a filter to the film deposition chamber; and
forming a tetrahedral amorphous carbon film by depositing the carbon ions on the target substrate
wherein the protective film has a thickness not greater than 3.0 nm.
2. A method according to claim 1 , wherein the protective film is mainly composed of a tetrahedral amorphous carbon film formed by a filtered cathodic arc method using a cathode target of glass state carbon.
3. A method according to claim 1 , wherein the density of aggregate particles present on the protective film is less than 30 particles/cm 2 .
4. A method according to claim 1 , wherein the target substrate comprises at least a substrate with a magnetic recording layer thereon.
5. A method according to claim 1 , wherein the glass state carbon is produced by carbonizing and graphitizing a thermosetting resin through a heat treatment under an inert gas atmosphere.