Adaptive pressure insensitive mass flow controller and method for multi-gas applications

1. A mass flow controller comprising:

a valve that is adjustable to control a flow rate of a fluid responsive to a control signal;

a pressure transducer that provides a pressure signal that indicates a pressure of the fluid;

a thermal mass flow sensor that provides a measured flow rate of the fluid;

a memory to store characterization data that relates flow values to valve position values for each of a plurality of pressure values;

a control system that disengages a feedback control loop when a rate of pressure change of the fluid satisfies a threshold condition, and when the feedback control loop has been disengaged, the control system controls the valve based upon the pressure signal and the characterization data that is adjusted based upon any differences between set point signals and corresponding measured flow signals obtained each time the feedback control loop is re-engaged, and wherein the control system changes the characterization data responsive to any differences between set point signals and corresponding measured flow signals obtained each time the feedback control loop is re-engaged.

2. The mass flow controller of claim 1 , wherein the control system reengages the feedback control loop when a timer has expired.

3. The mass flow controller of claim 1 , wherein the control system reengages the feedback control loop when the rate of pressure change of the fluid falls below the threshold condition.

4. A mass flow controller comprising:

a valve that is adjustable to control a flow rate of a fluid responsive to a valve control signal;

a pressure transducer that provides a pressure signal that indicates a pressure of the fluid;

a memory to store characterization data that relates flow values to valve position values for each of a plurality of pressure values;

a thermal mass flow sensor that provides a measured flow rate of the fluid; and

a control system including:

a processor to control the valve with the valve control signal responsive to a set point signal; and

a non-transitory, tangible processor readable storage medium coupled to the processor, encoded with processor readable instructions for controlling the valve when executed by the processor, the instructions comprising instructions for:

controlling the valve using a feedback control loop, the feedback control loop controlling the valve based upon a difference between the measured flow rate and the set point signal;

receiving the pressure signal generated by the pressure transducer;

disengaging, responsive to a rate of pressure change of the fluid satisfying a threshold condition, the feedback control loop;

calculating a valve position of the valve based on the pressure signal when the feedback control loop has been disengaged and the characterization data;

re-engaging the feedback control loop after one of a time period or threshold condition is met;

determining, when the feedback control loop is first re-engaged, a difference between the measured flow rate and the set point signal; and

applying an adjustment to the characterization data based upon the difference to improve an accuracy of the calculation of the valve position when the feedback control loop is disengaged again.

5. The mass flow controller of claim 4 , wherein the instructions include instructions for:

modifying a scaling factor based upon the difference;

wherein adjusting the characterization data includes multiplying the characterization data by the scaling factor without modifying the characterization data.

6. The mass flow controller of claim 4 , wherein applying the adjustment includes changing how much the valve position moves when there is a change in pressure while the feedback control loop is disengaged.

7. The mass flow controller of claim 4 , wherein the time period is based upon a magnitude of the pressure change.

8. The mass flow controller of claim 4 , wherein the instructions include instructions for:

monitoring, while the feedback control loop is disengaged, a pressure of the fluid;

wherein the threshold condition is the rate of pressure change falling below a particular level.

9. A mass flow controller comprising:

a valve that is adjustable to control a flow rate of a fluid responsive to a control signal;

a pressure transducer that provides a pressure signal that indicates a pressure of the fluid;

a thermal mass flow sensor that provides a measured flow rate of the fluid;

a memory to store characterization data that relates flow values to valve position values for each of a plurality of pressure values;

a control system that disengages a feedback control loop when a rate of pressure change of the fluid satisfies a threshold condition, and when the feedback control loop has been disengaged, the control system controls the valve based upon the pressure signal and the characterization data that is adjusted based upon any differences between set point signals and corresponding measured flow signals obtained each time the feedback control loop is re-engaged, and wherein the control system changes the characterization data responsive to any differences between set point signals and corresponding measured flow signals obtained each time feedback control loop is re-engaged, and wherein the control system does not change the characterization data in the memory and applies a scaling factor to the characterization data responsive to any differences between set point signals and corresponding measured flow signals obtained each time the feedback control loop is re-engaged.

10. The mass flow controller of claim 9 , wherein the control system reengages the feedback control loop when a timer has expired.

11. The mass flow controller of claim 9 , wherein the control system reengages the feedback control loop when the rate of pressure change of the fluid falls below the threshold condition.