MEMS device forming method and device with MEMS structure
View Patent ↗A method of forming a MEMS device by encapsulating a MEMS element with a sacrificial layer portion deposited over a substrate arrangement, the portion defining a cavity for the MEMS element, forming at least one strip of a further sacrificial material extending outwardly from the portion, forming a cover layer portion over the sacrificial layer portion, the cover layer portion terminating on the at least one strip, removing the sacrificial layer portion and the at least one strip, the removal of the at least one strip defining at least one vent channel extending laterally underneath the cover layer portion and sealing the at least one vent channel. A device including such a packaged micro electro-mechanical structure.
1. A device comprising:
a substrate covered by a cover layer portion,
a cavity between the substrate and the cover layer portion, said cavity including a micro electro-mechanical structure;
wherein the cover layer includes a patterned support structure layer having an etching hole disposed above the cavity;
at least one vent channel underneath the cover layer portion, said at least one vent channel extending laterally from said cavity; and
a sealing layer covering the cover layer portion and sealing the at least one vent channel and the etching hole above the cavity.
2. The device of claim 1 , wherein the cover layer portion comprises hydrogen fluoride-treated SIPOS.
3. The device of claim 1 , wherein the patterned support structure is covered by the cover layer portion.
4. The device of claim 1 , wherein the at least one vent channel has a height in the range of 5-50 nm.
5. The device of claim 1 , wherein the device further comprises a plurality of said vent channels.
6. The device of claim 1 , wherein the cover layer includes a porous layer filling in the etching hole above the cavity.
7. The device of claim 6 , wherein the porous layer consists of a semi-insulating polycrystalline silicon (SIPOS) layer.
8. The device of claim 1 , wherein the patterned support structure layer includes a plurality of etching holes distributed above the cavity.