Radiation image pickup apparatus and radiation image pickup/display system
View Patent ↗There are provided a radiation image pickup apparatus that may suppress deterioration of the transistor characteristic in the circuit in the periphery of the pixel section, and a radiation image pickup/display system including the apparatus. The radiation image pickup apparatus includes a pixel section provided on a substrate and having photoelectric conversion elements, a circuit section provided in the periphery of the pixel section on the substrate to drive the pixel section, and a wavelength conversion layer provided on the pixel section to convert a wavelength of radiation into a predetermined wavelength within a sensitivity range of the photoelectric conversion elements. The circuit section is provided in a region not facing an end of the wavelength conversion layer.
1. A radiation image pickup apparatus comprising:
a pixel section provided on a substrate and having photoelectric conversion elements;
a circuit section provided in the periphery of the pixel section and disposed on the substrate to drive the pixel section; and
a wavelength conversion layer provided on the pixel section to convert a wavelength of radiation into a predetermined wavelength within a sensitivity range of the photoelectric conversion elements,
wherein the circuit section is provided in a region not facing an end of the wavelength conversion layer in the periphery of the pixel section provided on the substrate.
2. The radiation image pickup apparatus according to claim 1 , wherein a protective film is provided over the wavelength conversion layer.
3. The radiation image pickup apparatus according to claim 1 , wherein the circuit section is disposed on an outer side from an end of the wavelength conversion layer.
4. The radiation image pickup apparatus according to claim 3 ,
wherein the end of the wavelength conversion layer has a tapered shape, and
the circuit section is disposed on an outer side from a foot of the tapered shape.
5. The radiation image pickup apparatus according to claim 1 , wherein the circuit section is disposed on an inner side from the end of the wavelength conversion layer.
6. The radiation image pickup apparatus according to claim 1 ,
wherein the circuit section includes transistors each including a semiconductor layer, and
the semiconductor layer includes one of polycrystalline silicon, microcrystalline silicon, and oxide semiconductor.
7. The radiation image pickup apparatus according to claim 6 , wherein the semiconductor layer includes low-temperature polycrystalline silicon.
8. The radiation image pickup apparatus according to claim 1 , wherein a wiring layer is disposed between the pixel section and the circuit section.
9. A radiation image pickup apparatus comprising:
a pixel section provided on a substrate and having photoelectric conversion elements;
a circuit section provided in the periphery of the pixel section on the substrate to drive the pixel section;
a wavelength conversion layer provided on the pixel section to convert a wavelength of radiation into a certain wavelength within a sensitivity range of the photoelectric conversion elements; and
an electric shield layer provided on the circuit section.
10. The radiation image pickup apparatus according to claim 9 , wherein a protective film is provided over the wavelength conversion layer.
11. The radiation image pickup apparatus according to claim 9 ,
wherein each of the photoelectric conversion elements has a semiconductor layer between a pair of conductive films, and
the electric shield layer is configured of the same material as that of one of the conductive films of the photoelectric conversion element.
12. The radiation image pickup apparatus according to claim 11 , wherein the electric shield layer includes a transparent conductive film.
13. The radiation image pickup apparatus according to claim 9 ,
wherein the circuit section includes transistors each including a semiconductor layer, and
the semiconductor layer includes one of polycrystalline silicon, microcrystalline silicon, and oxide semiconductor.
14. The radiation image pickup apparatus according to claim 13 , wherein the semiconductor layer includes low-temperature polycrystalline silicon.
15. A radiation image pickup/display system comprising:
an image pickup apparatus acquiring an image based on radiation; and
a display unit displaying an image acquired by the image pickup apparatus,
wherein the image pickup apparatus includes:
a pixel section provided on a substrate and having photoelectric conversion elements,
a circuit section provided in the periphery of the pixel section and disposed on the substrate to drive the pixel section, and
a wavelength conversion layer provided on the pixel section to convert a wavelength of radiation into a certain wavelength within a sensitivity range of the photoelectric conversion elements,
wherein the circuit section is provided in a region not facing an end of the wavelength conversion layer in the periphery of the pixel section provided on the substrate.
16. A radiation image pickup/display system comprising:
an image pickup apparatus acquiring an image based on radiation; and
a display unit displaying an image acquired by the image pickup apparatus,
wherein the image pickup apparatus includes:
a pixel section provided on a substrate and having photoelectric conversion elements,
a circuit section provided in the periphery of the pixel section on the substrate to drive the pixel section,
a wavelength conversion layer provided on the pixel section to convert a wavelength of radiation into a certain wavelength within a sensitivity range of the photoelectric conversion elements, and
an electric shield layer provided on the circuit section.