Display device and method of manufacturing the same
View Patent ↗According to one embodiment, a method of manufacturing a thin-film transistor circuit substrate including forming an oxide semiconductor thin film above an insulative substrate, forming a gate insulation film and a gate electrode which are stacked on a first region of the oxide semiconductor thin film, and exposing from the gate insulation film a second region and a third region of the oxide semiconductor thin film, the second region and the third region being located on both sides of the first region of the oxide semiconductor thin film, forming an interlayer insulation film of silicon nitride including dangling bonds of silicon, the interlayer insulation film covering the second region and the third region of the oxide semiconductor thin film, the gate insulation film and the gate electrode, and forming a source electrode and a drain electrode.
1. A display device comprising:
an oxide semiconductor thin film which is formed above an insulative substrate and includes a first region, and a second region and a third region which are formed on both sides of the first region and have a lower resistance than the first region;
a gate insulation film which is formed on the first region of the oxide semiconductor thin film, and exposes the second region and the third region;
a gate electrode formed on the gate insulation film;
a first interlayer insulation film of silicon nitride, which covers the second region and the third region of the oxide semiconductor thin film, the gate insulation film and the gate electrode, and includes a first contact hole reaching the second region and a second contact hole reaching the third region;
a source electrode which is in contact with the second region via the first contact hole; and
a drain electrode which is in contact with the third region via the second contact hole,
wherein in the first interlayer insulation film which is located immediately above the second region and the third region, an oxygen concentration of a bottom-side portion of the first interlayer insulation film is higher than a central portion which is located at a position corresponding to ½ of a thickness of the first interlayer insulation film.
2. The display device according to claim 1 , wherein in the oxide semiconductor thin film, an oxygen concentration of the second region and the third region is lower than an oxygen concentration of the first region.
3. The display device according to claim 1 , wherein the first interlayer insulation film includes, at least above the oxide semiconductor thin film, dangling bonds of silicon.
4. The display device according to claim 3 , wherein in the first interlayer insulation film which is located immediately above the second region and the third region, a central portion which is located at a position corresponding to ½ of a thickness of the first interlayer insulation film, includes a greater number of dangling bonds of silicon than a bottom-side portion of the first interlayer insulation film.
5. The display device according to claim 1 , wherein the oxide semiconductor thin film is formed of an oxide including at least one of indium (In), gallium (Ga) and zinc (Zn).
6. The display device according to claim 1 , further comprising a second interlayer insulation film which is formed on the first interlayer insulation film, the first contact hole and the second contact hole penetrating the second interlayer insulation film, and the source electrode and the drain electrode being formed on the second interlayer insulation film.
7. The display device according to claim 6 , wherein the second interlayer insulation film is formed of silicon oxide having a lower dielectric constant than silicon nitride.