Micromechanical resonating devices and related methods
Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure. A bias structure separated from the mechanical resonating structure is provided to tune a resonance frequency of the mechanical resonating structure.
1. An apparatus, comprising:
a suspended mechanical resonating structure; and
a bias structure disposed proximate a first side of the suspended mechanical resonating structure and separated from the suspended mechanical resonating structure by a first gap,
wherein the bias structure is configured to tune a resonance frequency of the suspended mechanical resonating structure by applying a bias to the suspended mechanical resonating structure,
wherein the bias structure comprises a comb structure, and
wherein the comb structure comprises a first, movable portion and a second, stationary portion.
2. The apparatus of claim 1 , wherein the bias structure is a first bias structure, and wherein the apparatus further comprises a second bias structure disposed proximate a second side of the suspended mechanical resonating structure and separated from the suspended mechanical resonating structure by a second gap, wherein the first and second bias structures are configured in combination to tune the resonance frequency of the suspended mechanical resonating structure.