Radiation imaging device, radiation imaging display system, and transistor
View Patent ↗There are provided a transistor and a radiation imaging device in which a shift in a threshold voltage due to radiation exposure may be suppressed. The transistor includes a first gate electrode, a first gate insulator, a semiconductor layer, a second gate insulator, and a second gate electrode in this order on a substrate. Each of the first and second gate insulators includes one or a plurality of silicon compound films having oxygen, and a total sum of thicknesses of the silicon compound films is 65 nm or less.
1. A transistor comprising:
a first gate electrode, a first gate insulator, a semiconductor layer, a second gate insulator, and a second gate electrode in this order on a substrate,
wherein,
each of the first and second gate insulators includes one or a plurality of silicon compound films having oxygen, and
a total sum of thicknesses of the one or the plurality of silicon compound films of both of the first and the second gate insulators is 10 nm or more and 65 nm or less.
2. The transistor according to claim 1 , wherein the silicon compound film is a silicon oxide film.
3. The transistor according to claim 2 ,
wherein,
the first gate insulator is a laminate in which a silicon nitride film and a silicon oxide film are laminated sequentially from the substrate side, and
the second gate insulator is a laminate in which a silicon oxide film, a silicon nitride film, and a silicon oxide film are laminated sequentially from the first gate electrode side.
4. The transistor according to claim 1 , wherein the semiconductor layer is made of polycrystalline silicon, microcrystalline silicon, amorphous silicon, or an oxide semiconductor.
5. The transistor according to claim 4 , wherein the semiconductor layer is made of low-temperature polycrystalline silicon.
6. The transistor according to claim 1 , wherein the first gate insulator is in direct contact with the semiconductor layer and the second gate insulator.
7. The transistor according to claim 6 , wherein each of the first gate electrode, the first gate insulator, the semiconductor layer, the second gate insulator, and the second gate electrode are successively layered in direct contact with each other on the substrate.
8. A radiation imaging device comprising:
a pixel section including a transistor and a photoelectric conversion element,
wherein,
the transistor includes a first gate electrode, a first gate insulator, a semiconductor layer, a second gate insulator, and a second gate electrode in this order on a substrate,
each of the first and second gate insulators includes one or a plurality of silicon compound films having oxygen, and
a total sum of thicknesses of the one or the plurality of silicon compound films of both of the first and the second gate insulators is 10 nm or more and 65 nm or less.
9. The radiation imaging device according to claim 8 , wherein the silicon compound film is a silicon oxide film.
10. The radiation imaging device according to claim 9 ,
wherein,
the first gate insulator is a laminate in which a silicon nitride film and a silicon oxide film are laminated sequentially from the substrate side, and
the second gate insulator is a laminate in which a silicon oxide film, a silicon nitride film, and a silicon oxide film are laminated sequentially from the first gate electrode side.
11. The radiation imaging device according to claim 8 , wherein the semiconductor layer is made of polycrystalline silicon, microcrystalline silicon, amorphous silicon, or an oxide semiconductor.
12. The radiation imaging device according to claim 11 , wherein the semiconductor layer is made of low-temperature polycrystalline silicon.
13. The radiation imaging device according to claim 8 , further comprising:
a wavelength conversion layer (i) on the pixel section, and (ii) operable to convert a wavelength of radiation into a wavelength in a sensitivity range of the photoelectric conversion element.
14. The radiation imaging device according to claim 8 , wherein the photoelectric conversion element is operable to absorb and convert radiation into an electric signal.
15. The radiation imaging device according to claim 8 , wherein the first gate insulator is in direct contact with the semiconductor layer and the second gate insulator.
16. The radiation imaging device according to claim 15 , wherein each of the first gate electrode, the first gate insulator, the semiconductor layer, the second gate insulator, and the second gate electrode are successively layered in direct contact with each other on the substrate.
17. A radiation imaging display system comprising:
an imaging device acquiring an image based on radiation, and a display device displaying the image acquired by the imaging device,
wherein,
the imaging device includes a pixel section including a transistor and a photoelectric conversion element,
the transistor includes a first gate electrode, a first gate insulator, a semiconductor layer, a second gate insulator, and a second gate electrode in this order on a substrate,
each of the first and second gate insulators includes one or a plurality of silicon compound films having oxygen, and
a total sum of thicknesses of the one or the plurality of silicon compound films of both of the first and the second gate insulators is 10 nm or more and 65 nm or less.
18. The radiation imaging display system according to claim 17 , wherein the first gate insulator is in direct contact with the semiconductor layer and the second gate insulator.
19. The radiation imaging display system according to claim 18 , wherein each of the first gate electrode, the first gate insulator, the semiconductor layer, the second gate insulator, and the second gate electrode are successively layered in direct contact with each other on the substrate.