Semiconductor device
View Patent ↗A semiconductor device is provided, which includes an N well having a peak concentration of 2E+17 atom/cm 3 or more in the range of 0.2 to 1 μm depth from the surface of a P-type semiconductor substrate, and a region provided below the N well, the region containing P-type impurities with higher concentration than concentration of electrons.
1. A semiconductor device comprising:
an N well having a peak impurity concentration of 2E+17 atom/cm 3 or more in the range of 0.2 μm to 1 μm depth from the surface of a P-type semiconductor substrate; and
a layer for preventing depletion-layer-expansion below the N well, the layer containing P-type impurities with higher concentration than concentration of carrier electrons generated in the P-type semiconductor substrate.
2. The semiconductor device according to claim 1 , wherein the P-type impurity concentration of the layer for preventing depletion-layer-expansion is in the range of about 2E+15 to 1E+17 atom/cm 3 .
3. The semiconductor device according to claim 2 , wherein the P-type impurity is boron.
4. The semiconductor device according to claim 1 , wherein N-type impurity concentration that is lower than the peak concentration as the range of a shaded portion illustrated in FIG. 7 is provided in the range of 1 μm or more to 4 μm or less from the surface of the P-type semiconductor substrate located the N well.
5. The semiconductor device according to claim 1 , wherein oxygen precipitation nuclei based on interstitial oxygen in the substrate are provided as gettering sites in a region that is separated from the N well by the layer for preventing depletion-layer-expansion in the P-type semiconductor substrate.
6. The semiconductor device according to claim 1 , wherein the semiconductor substrate has a triple-well structure having a P well in the N well.
7. The semiconductor device according to claim 6 wherein a memory cell is formed on the P well of the triple-well structure.
8. The semiconductor device according to claim 7 , wherein the memory cell has an NMOS transistor formed on the P well, and a capacitor that is electrically connected to the NMOS transistor.
9. The semiconductor device according to claim 1 , wherein the P-type semiconductor substrate is a silicon wafer that is obtained by forming an epitaxial silicon layer on a CZ substrate.
10. The semiconductor device according to claim 9 , wherein the epitaxial silicon layer has a thickness in the range of 1 to 3 μm.
11. The semiconductor device according to claim 10 , wherein the CZ substrate has P-type impurity concentration of about 1E+15 atom/cm 3 and oxygen concentration of about 8E+17 to 13E+17 atom/cm 3 and the epitaxial silicon layer is formed without doping.
12. The semiconductor device according to claim 11 , wherein the layer for preventing depletion-layer-expansion is formed by injecting P-type impurities into the substrate.
13. The semiconductor device according to claim 10 , wherein the CZ substrate has P-type impurity concentration of about 3E+15 to 8E+15 atom/cm 3 and oxygen concentration of about 8E+17 to 13E+17 atom/cm 3 and the epitaxial silicon layer is formed with doping P-type impurities in concentration of about 1E+15 atom/cm 3 or less.
14. The semiconductor device according to claim 9 , wherein the layer for preventing depletion-layer-expansion includes a defect-free layer that is formed in the epitaxial silicon layer.
15. The semiconductor device according to claim 9 , wherein a profile of the oxygen concentration is decreased from the vicinity of an interface between the CZ substrate and the epitaxial silicon layer toward the surface of the P-type semiconductor substrate.
16. The semiconductor device according to claim 1 , wherein the carrier electron concentration is concentration of carrier electrons that are generated by oxygen donor in the substrate during a manufacturing process of the semiconductor device.
17. The semiconductor device according to claim 1 , wherein the P-type semiconductor substrate is a CZ substrate having the P-type impurity concentration of about 1E+15 atom/cm 3 and oxygen concentration of about 9E+17 atom/cm 3 or less, and the carrier electrons generated in the P-type semiconductor substrate are lost in the final stage of manufacturing the semiconductor device.
18. The semiconductor device according to claim 1 , wherein the layer for preventing depletion-layer-expansion is provided plurally just below a plurality of the N wells.
19. The semiconductor device according to claim 1 , wherein the layer for preventing depletion-layer-expansion is provided continuously below a plurality of the N wells.