Method for producing semiconductor crystal, apparatus for crystal production and group 13 element nitride semiconductor crystal
View Patent ↗A semiconductor crystal is produced through crystal growth in the presence of a solvent in a supercritical and/or subcritical state in a reactor, wherein at least a part of the surface of the reactor and the surface of the member to be used inside the reactor is coated with a platinum group-Group 13 metal alloy coating film.
1. A method for producing a semiconductor crystal, comprising:
growing a crystal in the presence of a nitrogen-containing solvent and a mineralizer in a reactor; and
coating at least a portion of an inner surface of the reactor and a surface of a member placed inside the reactor with a platinum group-Group 13 metal alloy coating film at a temperature of from 400 to 700° C. and under a pressure of from 80 to 700 MPa,
wherein the member is placed inside the reactor such that the member is separable from the reactor.
2. The method for producing a semiconductor crystal of claim 1 , wherein the platinum group-Group 13 metal alloy coating film comprises Ga as the Group 13 metal.
3. The method for producing a semiconductor crystal of claim 1 , wherein the platinum group-Group 13 metal alloy coating film comprises Pt as the platinum group metal.
4. The method for producing a semiconductor crystal of claim 1 , wherein the coating comprises coating at least 50% of a total area of the inner surface of the reactor and the surface of the member with the platinum group-Group 13 metal alloy coating film.
5. The method for producing a semiconductor crystal of claim 1 , wherein the platinum group-Group 13 metal alloy coating is carried out simultaneously with at least a part of the growing of the crystal.
6. The method for producing a semiconductor crystal of claim 1 , wherein the platinum group-Group 13 metal alloy coating film is a film that comprises at least one alloy selected from the group consisting of Ga 3 Pt 5 , Ga 3 Pt 2 , GaPt, Ga 2 Pt, GaPt 2 and GaPt 3 .
7. The method for producing a semiconductor crystal of claim 1 , wherein the platinum group-Group 13 metal alloy coating film has a thickness of from 5 to 100 μm.
8. The method for producing a semiconductor crystal of claim 1 , wherein at least one of the growing and the coating is carried out multiple times.
9. The method for producing a semiconductor crystal of claim 1 , wherein the reactor and the member are formed of Pt or a Pt-containing alloy.
10. The method for producing a semiconductor crystal of claim 1 , wherein the coating forms the platinum group-Group 13 metal alloy coating in the reactor in the presence of the nitrogen-containing solvent and a Group 13 metal therein, at a temperature of from 400 to 700° C. and under a pressure of from 100 to 700 MPa.
11. The method for producing a semiconductor crystal of claim 1 , wherein the platinum group-Group 13 metal alloy coating film is polycrystalline.