Substrate treatment method and substrate treatment apparatus
An inventive substrate treatment method includes a silylation step of supplying a silylation agent to a substrate, and an etching step of supplying an etching agent to the substrate after the silylation step. The method may further include a repeating step of repeating a sequence cycle including the silylation step and the etching step a plurality of times. The cycle may further include a rinsing step of supplying a rinse liquid to the substrate after the etching step. The cycle may further include a UV irradiation step of irradiating the substrate with ultraviolet radiation after the etching step. The method may further include a pre-silylation or post-silylation UV irradiation step of irradiating the substrate with the ultraviolet radiation before or after the silylation step.
1. A substrate treatment method comprising:
a silylation step of supplying a silylation agent to a substrate formed with a silicon oxide film and a silicon nitride film, to increase selective etching of the silicon nitride film with respect to the silicon oxide film; and
a selective etching step of supplying an etching agent for selective etching of the silicon nitride film to the substrate after the silylation step, thereby selectively etching the silicon nitride film with suppressed etching of the silicon oxide film.
2. The substrate treatment method according to claim 1 , further comprising a heating step of heating the substrate, the heating step being performed simultaneously with the silylation step.
3. The substrate treatment method according to claim 1 , further comprising a repeating step of repeating a sequence cycle including the silylation step and the etching step a plurality of times.
4. The substrate treatment method according to claim 3 , wherein the cycle further includes a rinsing step of supplying a rinse liquid to the substrate after the etching step.
5. The substrate treatment method according to claim 3 , wherein the cycle further includes a UV irradiation step of irradiating the substrate with ultraviolet radiation after the etching step.
6. The substrate treatment method according to claim 1 , further comprising a pre-silylation UV irradiation step of irradiating the substrate with ultraviolet radiation before the silylation step.
7. The substrate treatment method according to claim 1 , further comprising a post-silylation UV irradiation step of irradiating the substrate with ultraviolet radiation after the silylation step.
8. The substrate treatment method according to claim 1 , further comprising:
a pre-silylation UV irradiation step of irradiating the substrate with ultraviolet radiation before the silylation step; and
a post-silylation UV irradiation step of irradiating the substrate with the ultraviolet radiation after the silylation step.
9. The substrate treatment method according to claim 1 , wherein the etching agent is a liquid mixture comprising hydrofluoric acid and ethylene glycol, a phosphoric acid aqueous solution, or a hydrofluoric acid.
10. The substrate treatment method according to claim 1 ,
wherein the silylation agent is nonaqueous,
wherein the etching agent is aqueous.
11. The substrate treatment method according to claim 1 , wherein the etching agent is a vapor comprising an etching component.
12. The substrate treatment method according to claim 1 , further comprising:
a rinsing step of supplying a rinse liquid to the substrate after the etching step, and
a drying step of removing the rinse liquid adhering to the substrate to dry the substrate after the rinsing step.
13. The substrate treatment method according to claim 1 , wherein the silylation agent is a silylation agent vapor or a silylation agent liquid.