Photoelectric conversion module and method of manufacturing photoelectric conversion module

1. A photoelectric conversion module comprising:

a substrate having a light transmitting property and having a mounting surface;

a photoelectric conversion element and an IC chip mounted on the mounting surface of said substrate;

a first electrode provided on a side surface of said substrate, electrically connected to said IC chip, and having a concave shape sunk deeper than other portions of the side surface;

an insulating layer provided along an outer edge of the mounting surface of said substrate;

a substrate-side base film formed on said insulating layer;

a cover member fixed to said substrate and forming, cooperatively with said substrate, an airtight chamber housing said photoelectric conversion element;

a cover-side base film formed on a junction area of said cover member with said substrate-side base film; and

a second electrode provided on a side surface of said cover member, continuing from said first electrode, and having a concave shape sunk deeper than other portions of the side surface of said cover member,

wherein said cover member has a projection that protrudes toward said substrate so as to surround said cover-side base film except at a vicinity of a ground electrode of said second electrode, and

wherein said cover-side base film is electrically connected to a ground electrode of said first electrode and to the ground electrode of said second electrode.

2. The photoelectric conversion module according to claim 1 , wherein said first electrode is formed in such a manner that, after a conductive film is applied on a wall surface of a through hole formed in a first wafer that is to be divided into a plurality of substrates, the first wafer is cut at a position passing on the through hole and the conductive film is cut.

3. The photoelectric conversion module according to claim 2 , wherein the conductive film includes a gold plating film on a surface layer.

4. The photoelectric conversion module according to claim 3 , wherein:

said substrate has a holding groove in a rear surface opposite the mounting surface; and

a tip portion of an optical fiber is fixed in the holding groove, and the module further comprising:

a mirror optically coupling the optical fiber and said photoelectric conversion element; and

a reinforcing member fixed to the rear surface of said substrate and holding, with said substrate, the tip portion of the optical fiber.

5. The photoelectric conversion module according to claim 4 , wherein said reinforcing member has a surface fixed to said substrate and smaller in area than the rear surface of said substrate.

6. The photoelectric conversion module according to claim 2 , wherein:

said substrate has a holding groove in a rear surface opposite the mounting surface; and

a tip portion of an optical fiber is fixed in the holding groove, and the module further comprising:

a mirror optically coupling the optical fiber and said photoelectric conversion element; and

a reinforcing member fixed to the rear surface of said substrate and holding, with said substrate, the tip portion of the optical fiber.

7. The photoelectric conversion module according to claim 6 , wherein said reinforcing member has a surface fixed to said substrate and smaller in area than the rear surface of said substrate.

8. The photoelectric conversion module according to claim 1 , wherein:

said substrate has a holding groove in a rear surface opposite the mounting surface; and

a tip portion of an optical fiber is fixed in the holding groove, and the module further comprising:

a mirror optically coupling the optical fiber and said photoelectric conversion element; and

a reinforcing member fixed to the rear surface of said substrate and holding, with said substrate, the tip portion of the optical fiber.

9. The photoelectric conversion module according to claim 8 , wherein said reinforcing member has a surface fixed to said substrate and smaller in area than the rear surface of said substrate.

10. The photoelectric conversion module according to claim 1 , wherein said cover member has, in a surface facing the mounting surface, a depression forming the airtight chamber, and wherein on a wall surface of the depression, a solder adsorbing film integrally continuing from said cover-side base film is formed.

11. The photoelectric conversion module according to claim 10 , wherein the solder adsorbing film covers a whole area of the wall surface of the depression.