Vapor deposition apparatus and method, and method of manufacturing organic light emitting display apparatus
View Patent ↗A vapor deposition apparatus, which is capable of performing a thin film deposition process and improving characteristics of a formed thin film, includes a chamber having an exhaust opening; a stage located in the chamber, and including a plurality of mounting surfaces on which the plurality of substrates may be mounted; and an injection unit having at least one injection opening for injecting a gas into the chamber in a direction parallel with surfaces of the plurality of substrates.
1. A vapor deposition apparatus for forming a thin film on a plurality of substrates, the apparatus comprising:
a chamber having an exhaust opening;
a stage in the chamber, and comprising a plurality of mounting surfaces adapted for the plurality of substrates to be mounted thereon;
an injection unit having at least one injection opening for injecting a gas into the chamber in a direction parallel with surfaces of the plurality of substrates; and
a driving unit configured to drive the stage to move the substrates in a direction normal to the surfaces of the plurality of substrates while the gas is being injected into the chamber.
2. The apparatus of claim 1 , wherein the plurality of mounting surfaces are disposed in the direction parallel with surfaces of the plurality of substrates.
3. The apparatus of claim 1 , wherein the injection unit is disposed above the stage.
4. The apparatus of claim 1 , wherein the plurality of mounting surfaces comprises at least two mounting surfaces that are disposed in parallel with each other.
5. The apparatus of claim 1 , wherein the exhaust opening is coupled to a pump.
6. The apparatus of claim 1 , wherein a source gas and a reaction gas are sequentially injected through the injection opening.
7. The apparatus of claim 1 , wherein the injection unit has a plurality of injection openings through which a source gas and a reaction gas are independently injected.
8. The apparatus of claim 1 , wherein the exhaust opening is closer to the bottom of the chamber than the substrates are.
9. The apparatus of claim 1 , further comprising a mask having a mask opening for forming the thin film on the substrates in a desired pattern,
wherein the mask is disposed on the substrates.
10. The apparatus of claim 1 , wherein the driving unit conveys the substrates in a direction normal to a surface of the substrates, on which the thin film is to be formed.
11. The apparatus of claim 1 , wherein the driving unit reciprocally conveys the substrates in a direction normal to a surface of the substrates, on which the thin film is to be formed.
12. The apparatus of claim 1 , wherein the injection unit has a plurality of injection openings that are separated from each other along a direction in which the substrates are moved so as to perform the deposition process a plurality of times while moving the substrates.
13. The apparatus of claim 1 , wherein the mounting surfaces are respectively located at a side of the stage and an opposite side of the stage.
14. The apparatus of claim 1 , wherein the mounting surfaces are located at all sides of the stage.
15. A vapor deposition method for forming thin films on a plurality of substrates, the method comprising:
mounting the plurality of substrates respectively on a plurality of mounting surfaces of a stage in a chamber;
injecting a source gas into the chamber through an injection unit in a direction parallel with surfaces of the substrates, on which thin films are to be formed;
performing exhaustion through an exhaust opening of the chamber;
injecting a reaction gas into the chamber through the injection unit in a direction parallel with the surfaces of the substrates; and
performing an exhaustion through the exhaust opening of the chamber,
wherein the thin film deposition is performed while moving the substrates in a direction perpendicular to the surfaces of the substrates, on which the thin film is formed, while being mounted on the stage.
16. The method of claim 15 , wherein the exhaustion is performed by a pump.
17. The method of claim 15 , wherein the injection unit has an injection opening, and the source gas and the reaction gas are sequentially injected through the injection opening.
18. The method of claim 15 , wherein the injection unit has a plurality of injection openings, and the source gas and the reaction gas are respectively injected through different ones of the injection openings.
19. The method of claim 15 , wherein the mounting of the substrates comprises placing a mask having an opening for forming the thin films of desired pattern on the substrates.
20. A method of manufacturing an organic light emitting display apparatus comprising a plurality of thin films on a plurality of substrates, the method comprising:
mounting the plurality of substrates on a plurality of mounting surfaces of a stage in a chamber;
injecting a source gas into the chamber through an injection unit in a direction parallel with surfaces of the substrate, on which the thin films are to be formed;
performing exhaustion through an exhaust opening of the chamber;
injecting a reaction gas into the chamber through the injection unit in a direction parallel with the surfaces of the substrates; and
performing exhaustion through the exhaust opening of the chamber,
wherein the thin film deposition is performed while moving the substrates in a direction perpendicular to the surfaces of the substrates, on which the thin film is formed, while being mounted on the stage.
21. The method of claim 20 , wherein the forming of the thin films comprises forming an encapsulation layer on a second electrode.
22. The method of claim 20 , wherein the forming of the thin films comprises forming an insulating layer.
23. The method of claim 20 , wherein the forming of the thin films comprises foaming a conductive layer.