Gallium nitride semiconductor structures with compositionally-graded transition layer
View Patent ↗The invention provides semiconductor materials including a gallium nitride material layer formed on a silicon substrate and methods to form the semiconductor materials. The semiconductor materials include a transition layer formed between the silicon substrate and the gallium nitride material layer. The transition layer is compositionally-graded to lower stresses in the gallium nitride material layer which can result from differences in thermal expansion rates between the gallium nitride material and the substrate. The lowering of stresses in the gallium nitride material layer reduces the tendency of cracks to form. Thus, the invention enables the production of semiconductor materials including gallium nitride material layers having few or no cracks. The semiconductor materials may be used in a number of microelectronic and optical applications.
1. A semiconductor structure comprising:
a transition layer over a silicon substrate;
a gallium nitride material layer over said transition layer;
wherein a composition of said transition layer at a top surface thereof substantially matches a composition of said gallium nitride material layer at a bottom surface thereof.
2. The semiconductor structure of claim 1 , wherein said composition is graded continuously across a thickness of said transition layer.
3. The semiconductor structure of claim 1 , wherein said transition layer comprises an alloy of gallium nitride selected from the group consisting of Al X In Y Ga (1-X-Y) N, In Y Ga (1-Y) N, and Al X Ga (1-X) N.
4. The semiconductor structure of claim 1 , wherein a concentration of gallium in said transition layer is graded.
5. The semiconductor structure of claim 3 , wherein x decreases in a direction away from said silicon substrate.
6. The semiconductor structure of claim 1 , wherein said transition layer comprises Al X Ga (1-X) N.
7. The semiconductor structure of claim 1 , wherein said transition layer comprises a superlattice including a series of alternating Al X In Y Ga (1-X-Y) N/Al A In B Ga (1-A-B) N layers.
8. The semiconductor structure of claim 1 , wherein said gallium nitride material layer comprises Al X In Y Ga (1-X-Y) N.
9. The semiconductor structure of claim 1 , wherein said semiconductor structure comprises at least one semiconductor device.
10. The semiconductor structure of claim 1 , wherein said semiconductor structure comprises at least one semiconductor FET.
11. The semiconductor structure of claim 1 , wherein said gallium nitride material layer has a crack level of less than 0.005 μm/μm 2 .
12. The semiconductor structure of claim 1 , wherein said gallium nitride material layer has a crack level of less than 0.001 μm/μm 2 .
13. The semiconductor structure of claim 1 , wherein said gallium nitride material layer is substantially free of cracks.
14. The semiconductor structure of claim 1 , wherein said gallium nitride material layer is monocrystalline.
15. The semiconductor structure of claim 1 , further comprising an intermediate layer over said silicon substrate and under said transition layer.
16. The semiconductor structure of claim 1 , wherein said silicon substrate is a (100) substrate.
17. The semiconductor structure of claim 1 , wherein said transition layer comprises a gallium nitride alloy.
18. A semiconductor FET comprising:
a transition layer comprising Al X Ga (1-X) N over an intermediate layer, said intermediate layer being over a silicon substrate;
a gallium nitride material layer over said transition layer;
wherein a composition of said transition layer at a top surface thereof substantially matches a composition of said gallium nitride material layer at a bottom surface thereof.
19. The semiconductor FET of claim 18 , wherein said gallium nitride material layer is monocrystalline.
20. The semiconductor FET of claim 18 , wherein said silicon substrate is a (100) substrate.