Organic electroluminescence element with enhanced electron blocking characteristics and manufacturing method thereof
View Patent ↗To improve the light emission characteristics of a device when a transition metal oxide is used for the hole injection layer, in particular, to enhance the electron blocking characteristics of a transition metal oxide. An organic electroluminescence element comprising an anode, a cathode and a plurality of functional layers formed between the anode and the cathode, the functional layer containing a layer with a light-emitting function composed of at least one kind of an organic semiconductor and, between the anode and the layer with a light-emitting function, a charge injection layer composed of at least one kind of a transition metal oxide, wherein the ratio of the metal to oxygen at the anode side of the transition metal oxide layer is smaller than the stoichiometric ratio and at the same time, the ratio of the metal to oxygen at the layer with a light-emitting function side is greater than that at the anode side.
1. A method for manufacturing an electroluminescence element which comprises an anode; a cathode; a plurality of functional layers formed between the anode and the cathode, the functional layer including a layer with a light-emitting function formed of at least one kind of an organic semiconductor; and a charge injection layer formed between the anode and the layer with a light-emitting function and formed from at least one kind of a transition metal oxide layer, the method comprising:
the step of forming the transition metal oxide layer is a step of forming the transition metal oxide layer such that the ratio of the metal to oxygen at the anode side in the transition metal oxide layer is smaller than the stoichiometric ratio and the ratio of the metal to oxygen at the layer with a light-emitting function side is greater than that at the anode side.
2. The method for manufacturing an organic electroluminescence element according to claim 1 , wherein
the step of forming said transition metal oxide layer contains a step of film-forming a transition metal oxide layer and a surface oxidation treatment step of oxidizing the surface of said transition metal oxide layer.
3. The method for manufacturing an organic electroluminescence element according to claim 2 , wherein
the surface oxidation treatment step contains a step of oxidatively treating the surface by a heat treatment.
4. The method for manufacturing an organic electroluminescence element according to claim 2 , wherein
the surface oxidation treatment step contains a step of oxidatively treating the surface by an ultraviolet treatment.
5. The method for manufacturing an organic electroluminescence element according to claim 2 , wherein
the surface oxidation treatment step contains a step of oxidatively treating the surface with an oxygen-containing plasma.
6. The method for manufacturing an organic electroluminescence element according to claim 1 , wherein
the step of forming said transition metal oxide layer is a dry process.
7. The method for manufacturing an organic electroluminescence element according to claim 2 , wherein
the step of forming said transition metal oxide layer is a dry process.
8. The method for manufacturing an organic electroluminescence element according to claim 3 , wherein
the step of forming said transition metal oxide layer is a dry process.
9. The method for manufacturing an organic electroluminescence element according to claim 4 , wherein
the step of forming said transition metal oxide layer is a dry process.
10. The method for manufacturing an organic electroluminescence element according to claim 5 , wherein
the step of forming said transition metal oxide layer is a dry process.