Method of manufacturing ESD resistant nitride semiconductor light emitting device with enhanced light extraction efficiency
View Patent ↗A nitride semiconductor light emitting device, and a method of manufacturing the same are disclosed. The nitride semiconductor light emitting device includes a substrate, an n-type nitride semiconductor layer disposed on the substrate and including a plurality of V-shaped pits in a top surface thereof, an active layer disposed on the n-type nitride semiconductor layer and including depressions conforming to the shape of the plurality of V-shaped pits, and a p-type nitride semiconductor layer disposed on the active layer and including a plurality of protrusions on a top surface thereof. Since the plurality of V-shaped pits are formed in the top surface of the n-type nitride semiconductor layer, the protrusions can be formed on the p-type nitride semiconductor layer as an in-situ process. Accordingly, the resistance to ESD, and light extraction efficiency are enhanced.
1. A method of manufacturing a nitride semiconductor light emitting device, the method comprising:
growing an n-type nitride semiconductor layer on a top surface of a substrate to form a plurality of V-shaped pits;
growing an active layer on the n-type nitride semiconductor layer, the active layer including depressions conforming to the shape of the plurality of V-shaped pits; and
growing a p-type nitride semiconductor layer on a top surface of the active layer, such that the p-type nitride semiconductor layer includes, on a top surface thereof, a plurality of protrusions at positions respectively corresponding to positions of the depressions of the active layer.
2. The method of claim 1 , wherein in the growing of the n-type nitride semiconductor layer, a growth temperature ranges from 700° C. to 950° C.
3. The method of claim 1 , wherein in the growing of the active layer, a growth temperature is 1000° C. or less.
4. The method of claim 1 , wherein in the growing of the p-type nitride semiconductor layer, a growth temperature is 1000° C. or higher.
5. The method of claim 1 , wherein the p-type nitride semiconductor layer including the plurality of protrusions is formed by regulating a flow of p-type dopants.
6. The method of claim 1 , wherein the plurality of protrusions are grown to correspond to the plurality of V-shaped pits, respectively.
7. The method of claim 1 , wherein the plurality of protrusions are grown to have greater widths than the plurality of V-shaped pits.
8. The method of claim 1 , further comprising, after the growing of the active layer, forming a p-type nitride-based superlattice layer on the active layer, the p-type nitride-based superlattice layer including depressions conforming to the shape of the plurality of V-shaped pits.
9. A method of manufacturing a nitride semiconductor light emitting device, the method comprising:
growing an n-type nitride semiconductor layer on a top surface of a substrate to form a plurality of V-shaped pits;
growing an active layer on the n-type nitride semiconductor layer, the active layer including depressions conforming to the shape of the plurality of V-shaped pits; and
growing a p-type nitride semiconductor layer on a to surface of the active layer, the p-type nitride semiconductor layer including a plurality of protrusions; and
after the growing of the n-type nitride semiconductor layer, forming an n-type nitride-based superlattice layer on the n-type nitride semiconductor layer, the n-type nitride-based superlattice layer including depressions conforming to the shape of the plurality of V-shaped pits.