Ultraviolet irradiator and ultraviolet irradiating apparatus using the same
An ultraviolet irradiator including a housing having an ultraviolet irradiation port through which the target is irradiated with the ultraviolet light, an ultraviolet lamp that emits ultraviolet light, a water-cooling jacket in which the ultraviolet lamp is mounted, a reflection plate that reflects light emitted from the ultraviolet lamp, the ultraviolet lamp, the water-cooling jacket and the reflection plate being mounted in the housing, and ultraviolet light emitted directly from the ultraviolet lamp and reflection light reflected from the reflection plate being irradiated to the outside of the housing, a heat withdrawing mechanism that withdraws heat of the reflection plate and discharges the heat to the outside of the housing; and a heat transfer member that transfers ambient heat in the housing to the heat withdrawing mechanism so that the heat withdrawing mechanism withdraws the ambient heat.
1. An ultraviolet irradiator for irradiating a target with ultraviolet light, comprising:
a housing having an ultraviolet irradiation port through which the target is irradiated with the ultraviolet light;
an ultraviolet lamp that emits ultraviolet light;
a water-cooling jacket in which the ultraviolet lamp is mounted;
a reflection plate that reflects light emitted from the ultraviolet lamp, the ultraviolet lamp, the water-cooling jacket and the reflection plate being mounted in the housing, and ultraviolet light emitted directly from the ultraviolet lamp and reflection light reflected from the reflection plate being irradiated to the outside of the housing;
a heat withdrawing mechanism that withdraws heat of the reflection plate and discharges the heat to the outside of the housing;
a heat transfer member that transfers ambient heat in the housing to the heat withdrawing mechanism so that the heat withdrawing mechanism withdraws the ambient heat; and
an auxiliary reflection plate that is disposed between the ultraviolet irradiation port of the housing and the ultraviolet lamp to adjust an illumination distribution, reflects light from the ultraviolet lamp and the reflection plate to the ultraviolet irradiation port to generate auxiliary reflection light to be applied to the target, and irradiates the target with uniform light by combining the light from the ultraviolet lamp and the reflection plate with the auxiliary reflection light; and wherein, the ultraviolet irradiation port is closed by a quartz glass window plate.
2. The ultraviolet irradiator according to claim 1 , further comprising an air blower that circulates air in the housing to cool the reflection plate, wherein the air blower sucks air that flows along the reflection plate while withdrawing the heat of the reflection plate and blows the air to the heat transfer member.
3. The ultraviolet irradiator according to claim 2 , wherein the ultraviolet lamp is configured in a tubular shape, the reflection plate and the heat transfer member are configured to extend along the ultraviolet lamp, and the air blower blows the air to the heat transfer member from a direction perpendicular to an extension direction of the heat transfer member.
4. The ultraviolet irradiator according to claim 1 , wherein air circulating in the housing flows along the auxiliary reflection plate while cooling the auxiliary reflection plate, and is sucked by the air blower.
5. The ultraviolet irradiator according to claim 1 , further comprising an ultraviolet transmission filter that is disposed between the ultraviolet irradiation port of the housing and the ultraviolet lamp and allows passage of only light of a predetermined ultraviolet region component out of the ultraviolet light emitted from the ultraviolet lamp and the reflection light reflected from the reflection plate, wherein the reflection plate absorbs light other than the light of the predetermined ultraviolet region component.
6. An ultraviolet irradiating apparatus comprising:
a sample chamber in which a sample is mounted; and
an ultraviolet irradiator that is freely incorporated in the ultraviolet irradiating apparatus to irradiate the target with ultraviolet light, wherein the ultraviolet irradiator comprises:
a housing having an ultraviolet irradiation port through which the target is irradiated with the ultraviolet light;
an ultraviolet lamp that emits ultraviolet light;
a water-cooling jacket in which the ultraviolet lamp is mounted;
a reflection plate that reflects light emitted from the ultraviolet lamp, the ultraviolet lamp, the water-cooling jacket and the reflection plate being mounted in the housing, and ultraviolet light emitted directly from the ultraviolet lamp and reflection light reflected from the reflection plate being irradiated to the outside of the housing;
a heat withdrawing mechanism that withdraws heat of the reflection plate and discharges the heat to the outside of the housing;
a heat transfer member that transfers ambient heat in the housing to the heat withdrawing mechanism so that the heat withdrawing mechanism withdraws the ambient heat; and
an auxiliary reflection plate that is disposed between the ultraviolet irradiation port of the housing and the ultraviolet lamp to adjust an illumination distribution, reflects light from the ultraviolet lamp and the reflection plate to the ultraviolet irradiation port to generate auxiliary reflection light to be applied to the target, and irradiates the target with uniform light by combining the light from the ultraviolet lamp and the reflection plate with the auxiliary reflection light; and wherein, the ultraviolet irradiation port is closed by a quartz glass window plate.
7. The ultraviolet irradiating apparatus according to claim 6 , further comprising an apparatus housing in which the sample chamber and the ultraviolet irradiator are mounted, wherein the housing has an opening and a door for opening and closing the opening, and the ultraviolet lamp is freely insertable and dismountable into and from the water-cooling jacket through the opening without dismounting the ultraviolet irradiator from the apparatus housing.
8. The ultraviolet irradiator according to claim 1 , further comprising an auxiliary reflection plate mount case around which the auxiliary reflection is mounted, wherein the ultraviolet lamp, the water-cooling jacket, the reflection plate, the heat withdrawing mechanism and the heat transfer member are disposed at an upper portion of the housing, and the auxiliary reflection plate mount case is disposed between the ultraviolet lamp and the ultraviolet irradiation port at a lower portion of the housing.
9. The ultraviolet irradiating apparatus according to claim 6 , wherein the ultraviolet irradiator further comprises an auxiliary reflection plate mount case around which the auxiliary reflection is mounted, the ultraviolet lamp, the water-cooling jacket, the reflection plate, the heat withdrawing mechanism and the heat transfer member are disposed at an upper portion of the housing, and the auxiliary reflection plate mount case is disposed between the ultraviolet lamp and the ultraviolet irradiation port at a lower portion of the housing.