Light-emitting display device and manufacturing method for light-emitting display device
View Patent ↗In the light-emitting display device according to the present invention, a side-contact structure is adopted in order to secure a TFT characteristic in a linear region (on-current). In a TFT configuring a switching transistor, a thickness of a semiconductor layer (channel layer) in a region corresponding to the source/drain electrodes is increased. In contrast, in a TFT configuring a driving transistor, in order to maintain an on current, a thickness of a semiconductor layer (channel layer) in a region corresponding to the source/drain electrodes is reduced. This configuration is manufactured using a half-tone mask. With this, it is possible to suppress the off-current in the switching transistor, while securing the on-current in the driving transistor.
1. A light-emitting display device comprising:
an array of a plurality of light-emitting pixels;
a plurality of data lines; and
a power line for supplying current to the light-emitting pixels, which are arranged on a substrate,
wherein each of the light-emitting pixels includes a first thin film transistor, a second thin film transistor, and a light-emitting element,
each of the first thin film transistor and the second thin film transistor includes:
a gate electrode provided on the substrate;
a gate insulating film provided on the gate electrode;
a semiconductor layer provided on the gate insulating film corresponding to the gate electrode, and having a source region, a channel region, and a drain region;
a doped semiconductor layer provided to cover upper surfaces of the source region and the drain region of the semiconductor layer; and
source/drain electrodes provided on the doped semiconductor layer,
a thickness of the source region and the drain region of the semiconductor layer in the first thin film transistor is greater than a thickness of the source region and the drain region of the semiconductor layer in the second thin film transistor,
the doped semiconductor layer covers side surfaces of channel-lengthwise ends of the semiconductor layer,
data voltage is applied to the gate electrode of the second thin film transistor from a corresponding one of the data lines, and
current according to the applied voltage is supplied to the light-emitting element from the power line through the second thin film transistor.
2. The light-emitting display device according to claim 1 , further comprising
a plurality of scanning lines on the substrate,
wherein the gate electrode of the first thin film transistor is connected to a corresponding one of the scanning lines, and a scanning signal is supplied to the gate electrode through the corresponding scanning line, and
one of the source/drain electrodes of the first thin film transistor is connected to the gate electrode of the second thin film transistor, and data voltage is applied from the corresponding data line through the first thin film transistor to which the scanning signal is supplied.
3. The light-emitting display device according to claim 1 ,
wherein the semiconductor layer includes: a first semiconductor layer provided on the gate insulating film; and a second semiconductor layer provided on the first semiconductor layer,
the first semiconductor layer is made of crystalline semiconductor, and
the second semiconductor layer is made of amorphous semiconductor.
4. The light-emitting display device according to claim 3 ,
wherein the thickness of the source region and the drain region of the first semiconductor layer in the first thin film transistor is identical to the thickness of the source region and the drain region of the first semiconductor layer in the second thin film transistor, and
the thickness of the source region and the drain region of the second semiconductor layer in the first thin film transistor is greater than the thickness of the source region and the drain region of the second semiconductor layer in the second thin film transistor.
5. The light-emitting display device according to claim 1 ,
wherein a thickness of the channel region of the semiconductor layer in the second thin film transistor is identical to the thickness of the semiconductor layer in the first thin film transistor, the channel region being a region other than the source region and the drain region of the semiconductor layer in the second thin film transistor.
6. The light-emitting display device according to claim 1 ,
wherein, in the semiconductor layer in the second thin film transistor, the thickness of the channel region which is other than the source region and the drain region is greater than the thickness of the source region and the drain region.
7. The light-emitting display device according to claim 6 ,
wherein the semiconductor layer in the second thin film transistor is formed such that the thickness of the source region and the drain region and the thickness of the channel region change discontinuously.
8. The light-emitting display device according to claim 1 ,
wherein a thickness of the source region and the drain region of the semiconductor layer in the second thin film transistor is adjusted at the time of forming, by etching using a multi-tone mask.
9. The light-emitting display device according to claim 1 ,
wherein the light-emitting element is an organic electroluminescent element.
10. A manufacturing method for a light-emitting display device including: an array of a plurality of light-emitting pixels; a plurality of data lines; and a power line for supplying current to the light-emitting pixels, which are arranged on a substrate, and each of the light-emitting pixels including a first thin film transistor, a second thin film transistor, and a light-emitting element, said manufacturing method comprising:
forming, on the substrate, gate electrodes of the first and second thin film transistors;
forming, on the gate electrodes, gate insulating films of the first and second thin film transistors;
forming, on the gate insulating films, semiconductor layers of the first and second thin film transistors such that a thickness of a source region and a drain region of a semiconductor layer in the second thin film transistor is smaller than a thickness of a source region and a drain region of a semiconductor layer in the first thin film transistor;
forming, on the semiconductor layers, doped semiconductor layers of the first and second thin film transistors; and
forming, on the doped semiconductor layers, source/drain electrodes of the first and second thin film transistors,
the gate electrode of the second thin film transistor is configured such that data voltage is applied from a corresponding one of the data lines, and
the light-emitting element is configured such that current according to the applied voltage is supplied from the power line through the second thin film transistor.
11. The manufacturing method for light-emitting display device according to claim 10 ,
wherein the thickness of the semiconductor layer in the second thin film transistor is adjusted at the time of forming, by etching using a multi-tone mask.