Perpendicular magnetic recording head
View Patent ↗A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PRM head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a hard mask layer adjacent to the first portion of the at least one side of the PMR pole.
1. A perpendicular magnetic recording (PMR) head comprising:
a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers;
a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole;
an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole; and
a hard mask layer adjacent to the first portion of the at least one side of the PMR pole.
2. The PMR head of claim 1 further wherein the width is not more than one hundred nanometers.
3. The PMR head of claim 1 further comprising:
a planarization stop layer residing between the nonmagnetic layer and the PMR pole.
4. The PMR head of claim 3 further comprising:
a seed layer residing between the planarization stop layer and the PMR pole.
5. A disk drive including a perpendicular magnetic recording (PMR) head comprising:
a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers;
a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole;
an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole; and
a hard mask layer adjacent to the first portion of the at least one side of the PMR pole.
6. The disk drive of claim 5 further wherein the width is not more than one hundred nanometers.
7. The disk drive of claim 5 further comprising:
a planarization stop layer residing between the nonmagnetic layer and the PMR pole.
8. The disk drive of claim 7 further comprising:
a seed layer residing between the planarization stop layer and the PMR pole.