IP Library Granted Patent US 8,633,524
Granted Patent B2
US 8,633,524 · App. 13/372,619 · Granted Jan 21, 2014

Solid-state imaging device

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Quick Facts
Patent No.
US 8,633,524
App. No.
13/372,619
Granted
Jan 21, 2014
Kind
B2
Abstract

A solid-state imaging device includes a substrate, a photoelectric conversion section, a first impurity layer having a carrier polarity of a second conductivity type, a charge-to-voltage converting section, an amplifying section, and a second impurity layer having a carrier polarity of the second conductivity type. The second impurity layer is disposed in a region between the photoelectric conversion section and the amplifying section. The second impurity concentration of the second P-type impurity layer is made higher than the first impurity concentration of the first impurity layer.

Claims (23)

1. A solid-state imaging device comprising:

a substrate;

a photoelectric conversion section configured to convert incident light into a signal charge, the photoelectric conversion section being disposed on said substrate and including an impurity region having a carrier polarity of a first conductivity type;

a first impurity layer being disposed on said substrate, having a carrier polarity of a second conductivity type opposite from said first conductivity type, and having a first impurity concentration;

a charge-to-voltage converting section configured to convert said signal charge converted by said photoelectric conversion section into voltage, the charge-to-voltage converting section being disposed on said first impurity layer and including an impurity region having a carrier polarity of said first conductivity type;

an amplifying section configured to amplify said voltage converted by said charge-to-voltage converting section, the amplifying section being disposed on said first impurity layer and including a source/drain region having a carrier polarity of said first conductivity type; and

a second impurity layer disposed in a region between said photoelectric conversion section and said amplifying section, having a carrier polarity of said second conductivity type, and having a second impurity concentration higher than said first impurity concentration.

2. The solid-state imaging device according to claim 1 , further comprising:

a transfer section configured to transfer said signal charge from said photoelectric conversion section to said charge-to-voltage converting section, the transfer section being disposed in a region between said photoelectric conversion section and said charge-to-voltage converting section; and

a third impurity layer disposed in a region of said transfer section on a side of said substrate, having a carrier polarity of said second conductivity type, and having a third impurity concentration higher than said first impurity concentration and equal to or lower than said second impurity concentration.

3. The solid-state imaging device according to claim 2 ,

wherein a distance between a surface of said third impurity layer on the side of said substrate and said substrate in a direction of thickness of said substrate is equal to or more than a distance between a surface of said first impurity layer on the side of said substrate and said substrate in the direction of thickness of said substrate.

4. The solid-state imaging device according to claim 1 ,

wherein a distance between a surface of said second impurity layer on a side of said substrate and said substrate in a direction of thickness of said substrate is equal to or more than a distance between a surface of said first impurity layer on the side of said substrate and said substrate in the direction of thickness of said substrate.

5. The solid-state imaging device according to claim 1 , further comprising

an element isolation layer formed by a technique of one of LOCOS and STI between said photoelectric conversion section and said amplifying section.

6. The solid-state imaging device according to claim 1 , further comprising:

a plurality of said photoelectric conversion sections arranged in a predetermined direction; and

a diffusion isolation layer formed by a technique of diffusion isolation in a region between said photoelectric conversion sections adjacent to each other in said predetermined direction.

7. The solid-state imaging device according to claim 1 ,

wherein said second impurity layer is disposed within said first impurity layer.

8. The solid-state imaging device according to claim 1 ,

wherein said first conductivity type is an N-type, and said second conductivity type is a P-type.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 19, 2016
From: SONY CORPORATION
To: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
Reel/Frame 040419/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 17, 2012
From: NOMOTO, KAZUKI; TAKESHITA, KANEYOSHI; OHRI, HIROYUKI
To: SONY CORPORATION
Reel/Frame 027723/0330 →