Method for producing epitaxial wafer
When a mixed gas of trichlorosilane and dichlorosilane is used as source gas, a silicon layer is epitaxially grown on a surface of a silicon wafer within a temperature range of 1000 to 1100° C., preferably, 1040 to 1080° C. When dichlorosilane is used as source gas, a silicon layer is epitaxially grown on a surface of a silicon wafer within a temperature range of 900 to 1150° C., preferably, 1000 to 1150° C. According to this, a silicon epitaxial wafer, which has low haze level, excellent flatness (edge roll-off), and reduced orientation dependence of epitaxial growth rate, and is capable of responding to the higher integration of semiconductor devices, can be obtained, and this epitaxial wafer can be used widely in production of semiconductor devices.
1. A method for producing an epitaxial wafer by epitaxially growing a silicon layer on a surface of a silicon wafer, the method comprising:
using a mixed gas of trichlorosilane and dichlorosilane as source gas, and epitaxially growing the silicon layer within a temperature range of 1000 to 1100° C.; and
preventing a haze level of the resulting epitaxial wafer from getting worse than a haze level of polished wafer, and making the resulting epitaxial wafer excellent in flatness; and
the temperature region of the epitaxial growth is set in the range of 1040 to 1080° C.,
the haze level of the resulting epitaxial wafer is controlled in the range of 0.050 to 0.080 ppm when measured in DWN mode using a KLA-Tencor particle counter (SP-1), and
the flatness is improved so that edge roll-off is within a range of −20 nm to +20 nm, and when the orientation dependence of epitaxial growth rate is evaluated with a film thickness of an epitaxial layer along an orientation of 45° relative to reference crystal orientation, given that a film thickness of the epitaxial layer along reference crystal orientation be taken as 1, the film thickness of the epitaxial layer along the orientation of 45° is controlled to be 0.985 or more.
2. The method for producing an epitaxial wafer according to claim 1 , further comprising:
reducing orientation dependence of epitaxial growth rate in the resulting wafer.
3. The method for producing an epitaxial wafer according to claim 1 , wherein a mixing ratio of trichlorosilane and dichlorosilane is set, by volume, in the proportion of 0.066 to 0.15 part of dichlorosilane to 1 part of trichlorosilane.
4. The method for producing an epitaxial wafer according to claim 1 , wherein the temperature region of the epitaxial growth is set in a feed dominant temperature territory.
5. The method for producing an epitaxial wafer according to claim 1 , wherein the growth rate in the epitaxial growth of the silicon layer is set to be larger than 1.5 μm/min.
6. A method for producing an epitaxial wafer by epitaxially growing a silicon layer on a surface of a silicon wafer, comprising:
using dichlorosilane as source gas, and epitaxially growing the silicon layer within a temperature range of 900 to 1150° C.; and
preventing a haze level of the resulting epitaxial wafer from getting worse than a haze level of polished wafer and making the resulting epitaxial wafer excellent in flatness, and the temperature region of the epitaxial growth is set to a temperature range of 1000 to 1050° C.,
the haze level of the resulting epitaxial wafer is controlled in the range of 0.050 to 0.080 ppm when measured in DWN mode using a KLA-Tencor particle counter (SP-1), and
the flatness is improved so that edge roll-off is within a range of −14 nm to +14 nm.
7. The method for producing an epitaxial wafer according to claim 6 , wherein the temperature region of the epitaxial growth is set in a feed dominant temperature territory.
8. The method for producing an epitaxial wafer according to claim 6 , wherein the silicon wafer is subjected to preannealing treatment prior to the epitaxial growth.
9. The method for producing an epitaxial wafer according to claim 8 , wherein the preannealing treatment is performed at a temperature higher than the epitaxial growth temperature.
10. A method for producing an epitaxial wafer by epitaxially growing a silicon layer on a surface of a silicon wafer, comprising:
using dichlorosilane as source gas, and epitaxially growing the silicon layer within a temperature range of 900 to 1150° C.; and
reducing orientation dependence of epitaxial growth rate in the resulting wafer wherein, when the orientation dependence of epitaxial growth rate is evaluated with a film thickness of the epitaxial layer along an orientation of 45° relative to reference crystal orientation, given that a film thickness of the epitaxial layer along reference crystal orientation be taken as 1, the film thickness of the epitaxial layer along the orientation of 45° is controlled to be 0.985 or more; and
wherein the flatness of the epitaxial wafer is within a range of −14 nm to +14 nm in terms of the edge roll-off.
11. The method for producing an epitaxial wafer according to claim 10 , wherein the epitaxial growth temperature range is set in the range of 1000 to 1150° C., and flatness evaluated with edge roll-off of the resulting epitaxial wafer is controlled to be substantially equivalent to or more excellent than a current status.
12. The method for producing an epitaxial wafer according to claim 10 , wherein the silicon wafer is subjected to preannealing treatment prior to the epitaxial growth.
13. The method for producing an epitaxial wafer according to claim 12 , wherein the preannealing treatment is performed at a temperature higher than the epitaxial growth temperature.