Angular velocity sensor
View Patent ↗An angular velocity sensor includes a vibrator that vibrates with a drive signal; and a first-sensing-electrode on the vibrator that outputs a first signal containing a first-sense-component generated based on an angular velocity of the vibrator and a first-monitor-component generated based on a drive signal. The sensor includes a second-sensing-electrode on the vibrator that outputs a second signal containing a second-sense-component with a phase substantially the same as that of the first-sense-component and a second-monitor-component with a phase substantially opposite to that of the first-monitor-component; a first-signal-line one end of which is connected to the first-sensing-electrode; and a second-signal-line one end of which is connected to the second-sensing-electrode. The sensor includes a first-sensing-terminal connected to the other ends of the first- and second-signal-lines; and a disconnection-sensing-circuit that outputs a disconnection-sense-signal indicating that the first- or second-signal-line is disconnected, based on a signal from the first-sensing-terminal.
1. An angular velocity sensor comprising:
a vibrator including an arm and a weight on an XY plane composed of an X axis and a Y axis perpendicular to each other;
a driving circuit for driving the vibrator; and
a sensing circuit for sensing angular velocity given to the vibrator,
wherein the vibrator includes a first sensing electrode on the arm, a second sensing electrode on the arm, a third sensing electrode on the arm and a fourth sensing electrode on the arm;
wherein a monitor signal from a monior electrode on the vibrator is input into the driving circuit, and the driving circuit outputs a driving signal to a driving electrode on the vibrator,
wherein the sensing circuit includes:
a first sensing terminal connected to the first sensing electrode by a first signal line and connected to the second sensing electrode by a second signal line;
a second sensing terminal connected to the third sensing electrode by a third signal line and connected to the fourth sensing electrode by a fourth signal line;
a first disconnection sensing circuit; and
second disconnection sensing circuit,
wherein the first sensing electrode outputs a first signal containing a first sense component and a first monitor component,
wherein the second sensing electrode outputs a second signal containing a second sense component with a phase substantially the same as a phase of the first sense component and a second monitor component with a phase substantially opposite to a phase of the first monitor component,
wherein the third sensing electrode outputs a third signal containing a third sense component with a phase substantially opposite to a phase of the first sense component and a third monitor component with a phase substantially the same as a phase of the first monitor component,
wherein the fourth sensing electrode outputs a third signal containing a fourth sense component with a phase substantially opposite to a phase of the first sense component and a fourth monitor component with a phase substantially opposite to a phase of the first monitor component,
wherein a signal output from the first sensing terminal is input into the sensing circuit, and the sensing circuit senses an angular velocity around a Z axis substantially perpendicular to the X axis and the Y axis,
wherein a signal output from the first sensing terminal is input into the first disconnection sensing circuit, and the first disconnection sensing circuit outputs a first disconnection sense signal showing that the first signal line or the second signal line is disconnected, and
wherein a signal output from the second sensing terminal is input into the second disconnection sensing circuit, and the second disconnection sensing circuit outputs a disconnection sense signal showing that the third signal line or the fourth signal line is disconnected.
2. The angular velocity sensor of claim 1 , wherein the first disconnection sensing circuit outputs the first disconnection sense signal when a level of a signal output from the first sensing terminal is equal to or higher than a given level.
3. The angular velocity sensor of claim 1 , further comprising a current-voltage converter connected to an output side of the first sensing terminal,
wherein the first disconnection sensing circuit outputs the first disconnection sense signal when a level of a signal output from the current-voltage converter is equal to or higher than a given level.
4. The angular velocity sensor of claim 1 , further comprising:
a logical sum circuit for outputting a disconnection sense signal in a case where at least one of the first disconnection sensing signal supplied from the first disconnection sensing circuit and the second disconnection sensing signal supplied from the second disconnection sensing circuit indicates a disconnection.
5. The angular velocity sensor of claim 1 ,
wherein an amplitude of the first monitor component is higher than an amplitude of the first sense component, and
wherein an amplitude of the second monitor component is higher than an amplitude of the second sense component.
6. The angular velocity sensor of claim 1 ,
wherein an amplitude of the third monitor component is higher than an amplitude of the third sense component, and
wherein an amplitude of the fourth monitor component is higher than an amplitude of the fourth sense component.
7. The angular velocity sensor of claim 1 , wherein the first disconnection sensing circuit outputs the first disconnection sense signal when a level of a signal output from the first sensing terminal is outside of a predetermined range.
8. The angular velocity sensor of claim 1 , further comprising a current-voltage converter connected to an output side of the first sensing terminal,
wherein the first disconnection sensing circuit outputs the first disconnection sense signal when a level of a signal output from the current-voltage converter is outside of a predetermined range.
9. The angular velocity sensor of claim 1 , further comprising:
a logical operation circuit for outputting a disconnection sense signal in a case where at least one of the first disconnection sensing signal supplied from the first disconnection sensing circuit and the second disconnection sensing signal supplied from the second disconnection sensing circuit indicates a disconnection.