Semiconductor device and method for manufacturing the same
After the formation of a first interlayer insulating, an etching stopper film made of SiON is formed thereon. Subsequently, a contact hole extending from the upper surface of the etching stopper film and reaching a high concentration impurity region is formed, and a first plug is formed by filling W into the contact hole. Next, a ferroelectric capacitor, a second interlayer insulating film, and the like are formed. Thereafter, a contact hole extending from the upper surface of the interlayer insulating film and reaching the first plug is formed. Then, the contact hole is filled with W to form a second plug. With this, even when misalignment occurs, the interlayer insulating film is prevented from being etched.
1. A method for manufacturing a semiconductor device comprising:
forming a transistor in a semiconductor substrate;
forming a first insulating film on the semiconductor substrate, and the transistor;
forming a ferroelectric capacitor on the first insulating film, the ferroelectric capacitor including a lower electrode, a ferroelectric film, and an upper electrode;
forming a second insulating film on the first insulating film, and the ferroelectric capacitor;
forming an etching stopper film on the second insulating film;
forming a first plug, which reaches an impurity region of the transistor, in the etching stopper film, the first insulating film and the second insulating film;
forming a third insulating film on the etching stopper film and the first plug; and
forming a second plug, which reaches the first plug, in the third insulating film.
2. The method for manufacturing a semiconductor device according to claim 1 , further comprising:
forming a fourth insulating film on the etching stopper film before forming the first plug,
wherein:
the first plug is formed in the first insulating film, the second insulating film, the etching stopper film and the fourth insulating film.
3. The method for manufacturing a semiconductor device according to claim 2 , wherein a thickness of the fourth insulating film is equal to or less than 100 nm.
4. The method for manufacturing a semiconductor device according to claim 1 , wherein:
forming the first plug includes:
forming a fourth insulating film on the etching stopper film;
forming a first part of a first contact hole in the third insulating film;
forming a second part of the first contact hole, which has a diameter smaller than a diameter of the first part of the first contact hole, inside the first part of the first contact hole and in the etching stopper film, the second insulating film and the first insulating film; and
forming a conductive material in the first part of the first contact hole and the second part of the first contact hole.
5. The method for manufacturing a semiconductor device according to claim 1 , wherein the etching stopper film includes any one of insulating materials selected from a group consisting of SiON, SiN, AlOx, TiOx, ZrOx, MgOx, and MgTiOx.
6. The method for manufacturing a semiconductor device according to claim 1 , wherein a barrier film is formed above the ferroelectric capacitor.