Semiconductor device
View Patent ↗Disclosed is a semiconductor device having a multilayer wiring structure, in which a dummy pattern is formed in a wiring void with favorable manufacturing efficiency. In a semiconductor device having a multilayer wiring structure, dummy pattern ( 21 ) is formed in relatively narrow wiring void (Area_S 1 ) so as to extend in a direction different from that of dummy patterns ( 22, 23 ) formed in relatively wide wiring void (Area_S 2 ).
1. A semiconductor device having a multilayer wiring structure, comprising a first wiring layer including a plurality of wirings and a plurality of dummy patterns, wherein
a plurality of wiring voids is included in the first wiring layer, each of the plurality of wiring voids formed between a first and second ones of the plurality of wirings,
the plurality of dummy patterns is formed in the plurality of wiring voids in the first wiring layer,
the plurality of wiring voids comprises a relatively narrow wiring void and a relatively wide wiring void,
the plurality of dummy patterns includes a first predetermined number of dummy patterns formed in the relatively narrow wiring void and extending in a first direction in the first wiring layer and a second predetermined number of dummy patterns formed in the relatively wide wiring void and extending in a second direction perpendicular to the first direction in the first wiring layer.
2. The semiconductor device of claim 1 , wherein the plurality of wires extends in the first direction.
3. The semiconductor device of claim 1 , wherein
the plurality of wirings comprises a signal wiring and a power supply wiring,
a distance between the signal wiring and one of the plurality of dummy patterns adjacent to the signal wiring is larger than a distance between a power supply wiring and a dummy pattern adjacent to the power supply wiring.
4. The semiconductor device of claim 1 , wherein the plurality of dummy patterns includes a third predetermined number of dummy patterns formed in the relatively wide wiring void and extending in the first direction.
5. The semiconductor device of claim 1 , wherein a first region in the first wiring layer defined by the plurality of dummy patterns overlays a second region in an upper wiring layer having no wiring.
6. The semiconductor device of claim 1 , wherein a first region in the first wiring layer defined by the plurality of dummy patterns overlays a second region in a lower wiring layer having no wiring.
7. The semiconductor device of claim 1 , wherein the first direction in which the first predetermined number of dummy patterns formed in the relatively narrow wiring void extends is same as a preferential wiring direction of a second wiring layer located immediately above or below the first wiring layer.
8. The semiconductor device of claim 1 , wherein a central axis of a wiring formed in a second wiring layer is aligned with a central axis of one of the plurality of dummy patterns formed in the first wiring layer in a plan view.
9. The semiconductor device of claim 1 ,
wherein a first region formed by the plurality of dummy patterns is included in a static random access memory (SRAM) block.
10. The semiconductor device of claim 1 ,
wherein a first region formed by the plurality of dummy patterns is included in a read only memory (ROM) block.
11. The semiconductor device of claim 1 ,
wherein a first region formed by the plurality of dummy patterns is included in an analog circuit block.