Nanowire transistor and method for fabricating the same
View Patent ↗A nanowire transistor according to the present invention includes: at least one nanowire 13 including a core portion 13 a that functions as a channel region and an insulating shell portion 13 b that covers the surface of the core portion 13 a ; source and drain electrodes 14 and 15 , which are connected to the nanowire 13 ; and a gate electrode 21 for controlling conductivity in at least a part of the core portion 13 a of the nanowire 13 . The core portion 13 a is made of semiconductor single crystals including Si and has a cross section with a curved profile on a plane that intersects with the longitudinal axis thereof. The insulating shell portion 13 b is made of an insulator including Si and functions as at least a portion of a gate insulating film.
1. A method for fabricating a nanowire transistor, the method comprising steps of:
providing at least one nanowire including a core portion that functions as a channel region and an insulating shell portion that covers the surface of the core portion; and
forming source and drain electrodes to be connected to the nanowire and also forming a gate electrode for controlling conductivity in at least a part of the core portion of the nanowire,
wherein the step of providing the nanowire includes steps of:
forming a nanowire material, which is made of semiconductor single crystals including Si and which has a polygonal cross section on a plane that intersects with the longitudinal axis thereof, by a crystal growing process; and
thermally oxidizing the surface of the nanowire material to form the insulating shell portion on the surface, and
wherein the step of thermally oxidizing comprises thermally oxidizing the surface of the nanowire material having the polygonal cross section such that a cross section that intersects with the longitudinal axis of the core portion has a curved profile.
2. The method of claim 1 , wherein:
the nanowire material has a diameter of at least 35 nm, and
the step of thermally oxidizing includes thermally oxidizing the surface until the insulating shell portion has a thickness of 15 nm or more.
3. The method of claim 1 , wherein the step of thermally oxidizing comprises oxidizing the surface of the nanowire material by a rapid thermal process.