Display apparatus and method of manufacturing the same
View Patent ↗A display apparatus including: a plurality of thin film transistors; and an interconnect region, wherein each of the thin film transistors includes a first protective film held in contact with a channel layer and disposed remotely from a gate electrode, a second protective film disposed on the first protective film, and a source and drain electrode assembly including a pair of electrodes held in contact with the channel layer, and the interconnect region includes a first interconnect, a second interconnect disposed in alignment with the first interconnect, and an insulating layer interposed between the first interconnect and the second interconnect and having a stacked structure including a first insulating film joined to the gate insulating film and a second insulating film joined to the second protective film.
1. A method of manufacturing a display apparatus, comprising:
forming a gate electrode and a first interconnect layer on a substrate;
forming a gate insulating film and a first insulating film respectively on said gate electrode and said first interconnect layer, and thereafter forming a semiconductor layer mainly made of an oxide semiconductor on said gate insulating film and said first insulating film;
forming a first protective film on said semiconductor layer, thereafter etching said semiconductor layer and said first protective film, forming a channel layer mainly made of an oxide semiconductor on which said first protective film is stacked, in a region aligned with said gate electrode, and removing said semiconductor layer and said first protective film from at least a region aligned with said first interconnect layer;
forming a second protective film and a second insulating film respectively on said first protective film and said first insulating film, and thereafter etching said second protective film; and
forming a pair of electrodes of a source and drain electrode assembly in contact with said channel layer, and forming a second interconnect layer in a position aligned with at least said first interconnect layer, wherein a portion of said first insulating film and a portion of said second insulating film are between at least a portion of said first interconnect layer and at least a portion of said second interconnect layer, and wherein said at least a portion of said first interconnect layer, said portion of said first insulating film, said portion of said second insulating film, and said at least a portion of said second interconnect layer are directly stacked in an interconnect region.
2. The method of manufacturing a display apparatus according to claim 1 , wherein said gate insulating film and said first insulating film are formed in one step.
3. The method of manufacturing a display apparatus according to claim 1 , wherein said pair of electrodes and said second interconnect layer are formed in one step.