Nozzle, substrate processing apparatus, and substrate processing method
A nozzle for discharging droplets of a processing liquid for processing a substrate has a main body including a supply port, a drain port, a processing liquid flow passageway connecting the supply port and the drain port, and a plurality of discharge ports from which the processing liquid is discharged. The processing liquid flow passageway includes a plurality of branch flow channels, which branch out between the supply port and the drain port and collect together between the supply port and the drain port. The plurality of discharge ports form a plurality of columns respectively corresponding to the plurality of branch flow channels; and are aligned along and connected to the corresponding branch flow channels. A piezo element applies vibration to the processing liquid flowing through the plurality of branch flow channels.
1. A substrate processing method comprising:
a step of supplying a processing liquid to a supply port of a nozzle, having a main body in which the supply port is formed and a piezo element, in a state where the nozzle faces a major surface of a substrate; and
a step of applying voltage to the piezo element of the nozzle in parallel to the step of supplying the processing liquid;
wherein the nozzle is arranged to discharge droplets of the processing liquid toward the substrate,
the main body includes:
the supply port supplied with the processing liquid;
a drain port from which the processing liquid supplied to the supply port is drained;
a processing liquid flow passageway connecting the supply port and the drain port, the processing liquid flow passageway including a plurality of branch flow channels branching out between the supply port and the drain port and collecting together between the supply port and the drain port; and
a plurality of discharge ports forming a plurality of columns respectively corresponding to the plurality of branch flow channels, being aligned along the corresponding branch flow channels, and being connected to the corresponding branch flow channels; and
the piezo element is arranged to apply vibration to the processing liquid flowing through the plurality of branch flow channels.
2. A substrate processing method comprising:
a substrate holding and rotating step of holding and rotating a substrate; and
a nozzle moving step of moving a nozzle, having disposed therein a plurality of columns, in each of which a plurality of discharge ports arranged to discharge droplets of a processing liquid are aligned in a single column, and discharging the droplets of the processing liquid toward the substrate, along a locus passing through a rotation center of a major surface of the substrate when viewed from a perpendicular direction perpendicular to the major surface;
wherein in the nozzle moving step, the nozzle is held so that, when viewed from the perpendicular direction, the plurality of columns intersect the locus.
3. The substrate processing method according to claim 2 , wherein the nozzle moving step includes a step of moving the nozzle along the locus so that, between a central position at which the nozzle overlaps with the rotation center of the major surface when viewed from the perpendicular direction and a peripheral edge position at which the nozzle overlaps with a peripheral edge of the major surface when viewed from the perpendicular direction, the plurality of columns overlap successively with the rotation center of the major surface when viewed from the perpendicular direction.