Solid-state imaging device, electronic apparatus, and method for manufacturing the same
View Patent ↗A solid-state imaging device includes photoelectric conversion elements on an imaging surface of a substrate, receiving light incident on a light receiving surface and performing photoelectric conversion to produce a signal charge. Electrodes are interposed between the photoelectric conversion elements and light blocking portions are provided above the electrodes and interposed between the photoelectric conversion elements. The light blocking portions include an electrode light blocking portion formed to cover the corresponding electrode, and a pixel isolation and light blocking portion protruding convexly from the upper surface of the electrode light blocking portion. The photoelectric conversion elements are arranged at first pitches on the imaging surface. The electrode light blocking portions and the pixel isolation and light blocking portions are arranged at second and third pitches on the imaging surface. At least the third pitch increases with distance from the center toward the periphery of the imaging surface.
1. A solid-state imaging device comprising:
a plurality of photoelectric conversion elements disposed on an imaging surface of a substrate, each of the photoelectric conversion elements receiving light incident on a light receiving surface and performing photoelectric conversion to produce a signal charge;
a plurality of electrodes interposed between the photoelectric conversion elements arranged on the imaging surface of the substrate; and
a plurality of light blocking portions provided above the plurality of electrodes and interposed between the photoelectric conversion elements arranged on the imaging surface of the substrate,
wherein each of the light blocking portions includes
an electrode light blocking portion formed to cover the corresponding electrode, and
a pixel isolation and light blocking portion protruding convexly from the upper surface of the electrode light blocking portion,
the photoelectric conversion elements, the electrode light blocking portions, and the pixel isolation and light blocking portions are disposed at the same pitches on the imaging surface, and
the pixel isolation and light blocking portions are formed in such a way that the width in between the plurality of photoelectric conversion elements decreases with distance from the center toward the periphery of the imaging surface.
2. A solid-state imaging device comprising:
a plurality of photoelectric conversion elements disposed on an imaging surface of a substrate, each of the photoelectric conversion elements receiving light incident on a light receiving surface and performing photoelectric conversion to produce a signal charge;
a plurality of electrodes interposed between the photoelectric conversion elements arranged on the imaging surface of the substrate; and
a plurality of light blocking portions provided above the plurality of electrodes and interposed between the photoelectric conversion elements arranged on the imaging surface of the substrate,
wherein each of the light blocking portions includes
an electrode light blocking portion formed to cover the corresponding electrode, and
a pixel isolation and light blocking portion protruding convexly from the upper surface of the electrode light blocking portion,
the plurality of pixel isolation and light blocking portions are formed in such a way that the width of the spaces between the plurality of pixel isolation and light blocking portions increases with distance from the center toward the periphery of the imaging surface.