METHOD FOR FABRICATING A FLEXIBLE DEVICE
A method for fabricating a flexible device is provided, which includes providing a rigid carrier; forming an adhesion layer with a given pattern on the rigid carrier; forming a flexible substrate layer on the rigid carrier, wherein a portion of the flexible substrate layer contacts with the rigid carrier to form a first contact interface and the remaining contacts with the adhesion layer to form a second contact interface; forming at least one device on the surface of the flexible substrate layer opposite to the first contact interface; and separating the flexible substrate from the rigid carrier through the first contact interface.
1 . A method for fabricating a flexible device, comprising:
providing a rigid carrier;
forming an adhesion layer with a given pattern on the rigid carrier;
forming a flexible substrate layer on the rigid carrier, wherein a portion of the flexible substrate layer contacts with the rigid carrier to form a first contact interface and the remaining contacts with the adhesion layer to form a second contact interface;
forming at least one device on a surface of the flexible substrate layer opposite to the first contact interface; and
separating the flexible substrate from the rigid carrier through the first contact interface.
2 . The method according to claim 1 , wherein the rigid carrier comprises glass, quartz, a wafer, ceramic, a metal, or a metal oxide.
3 . The method according to claim 1 , wherein the adhesion layer with the given pattern is prepared from a composition containing a solvent and an adhesion promoter.
4 . The method according to claim 3 , wherein the adhesion promoter is selected from the group consisting of a silane coupling agent, an aromatic cyclic or heterocyclic compound, a phosphate compound, a multi-valent metal salt or ester, an organic polymer resin, and a chlorinated polyolefin.
5 . The method according to claim 3 , wherein the solvent is selected from the group consisting of propylene glycol monomethyl ether (PGME), dipropylene glycol methyl ether (DPM), propylene glycol monomethyl ether acetate (PGMEA), and a mixture thereof.
6 . The method according to claim 3 , wherein the adhesion layer with the given pattern is formed on the rigid carrier by a screen printing process, a coating process, a dispensing process, a photolithography process, or a combination thereof.
7 . The method according to claim 1 , wherein the flexible substrate is a thin glass substrate, a thin metal substrate, or a plastic substrate.
8 . The method according to claim 7 , wherein the flexible substrate is a plastic substrate selected from the group consisting of polyethylene naphthalate (PEN), polyethylene terephthalate (PET), polyethersulfone (PES), polycarbonate (PC), polyacrylate (PA), polysiloxane, polynorbornene (PNB), polyetheretherketone (PEEK), polyetherimide (PEI), polyimide (PI), and a mixture thereof.
9 . The method according to claim 1 , wherein the flexible substrate is polyimide, the rigid carrier is a metal substrate, and the adhesion layer comprises an aromatic cyclic or heterocyclic compound having an amino group as an adhesion promoter.
10 . The method according to claim 9 , wherein the adhesion promoter is selected from aminothiophenol, aminotetrazole, 2-(diphenylphosphino)ethylamine and a combination thereof.
11 . The method according to claim 1 , wherein the flexible substrate is polyimide, the rigid carrier is glass, and the adhesion layer comprises an adhesion promoter selected from a siloxane monomer having an amino group, a polysiloxane having an amino group, and a combination thereof.
12 . The method according to claim 11 , wherein the adhesion promoter is selected from 3-aminopropyl triethoxy silane (APrTEOS), 3-aminopropyl trimethoxy silane (APrTMOS), and a combination thereof.
13 . The method according to claim 1 , wherein the device is a semiconductor device, an electronic device, a display device, or a solar energy device.
14 . A method for separating a flexible substrate from a rigid carrier, comprising:
providing a rigid carrier;
forming an adhesion layer with a given pattern on the rigid carrier;
forming a flexible substrate layer on the rigid carrier, wherein a portion of the flexible substrate layer contacts with the rigid carrier to form a first contact interface and the remaining contacts with the adhesion layer to form a second contact interface; and
separating the flexible substrate from the rigid carrier through the first contact interface.