Touch substrate and method of manufacturing the same
View Patent ↗A touch substrate includes a base substrate, a sensing element and a switching element. The sensing element is disposed over the base substrate, senses infrared light, and includes a sensing semiconductor pattern. The switching element is electrically connected to the sensing element, includes a material substantially the same as a material of the sensing semiconductor pattern, and includes a switching semiconductor pattern having a thickness different from a thickness of the sensing semiconductor pattern.
1. A touch substrate comprising:
a base substrate;
a sensing element disposed on the base substrate, including a sensing semiconductor pattern, and configured to sense infrared light, wherein the sensing semiconductor pattern comprises a first sensing semiconductor pattern, and a second sensing semiconductor pattern disposed on the first sensing semiconductor pattern; and
a switching element electrically connected to the sensing element, including a same material as a material of the sensing semiconductor pattern, and including a switching semiconductor pattern having a thickness different from a thickness of the sensing semiconductor pattern,
wherein the switching semiconductor pattern comprises a first switching semiconductor including a same material as a material of the first sensing semiconductor pattern, and a second switching semiconductor pattern including a same material as a material of the second sensing semiconductor pattern, and disposed on the first switching semiconductor pattern.
2. The touch substrate of claim 1 , wherein the first sensing semiconductor pattern includes amorphous silicon (a-Si), and a second sensing semiconductor pattern includes amorphous silicon germanium (a-SiGe).
3. The touch substrate of claim 1 , wherein the second sensing semiconductor pattern has a first thickness, and the second switching semiconductor pattern has a second thickness smaller than the first thickness.
4. The touch substrate of claim 3 , wherein the first thickness is substantially the same as or more than about 4000 Å, and the second thickness is in a range between about 500 Å and about 1500 Å.
5. The touch substrate of claim 1 , wherein the second switching semiconductor pattern includes a first semiconductor portion having a first thickness and a second semiconductor portion having a second thickness smaller than the first thickness.
6. The touch substrate of claim 5 , wherein the switching element further comprises:
a switching gate electrode overlapping with the first and second switching semiconductor patterns; and
a switching source electrode and a switching drain electrode spaced apart from each other, and disposed over the first and second switching semiconductor patterns, and wherein
the first semiconductor portion overlaps with a space between the switching source electrode and the switching drain electrode, and
the second semiconductor portion overlap's with the switching source electrode and the switching drain electrode.
7. The touch substrate of claim 6 , wherein the switching element further comprises a switching ohmic contact pattern disposed between the second switching semiconductor pattern and each of the switching source and drain electrodes.
8. The touch substrate of claim 1 , wherein the sensing element further comprises:
a sensing gate electrode overlapping with the first and second sensing semiconductor patterns; and
a sensing source electrode and a sensing drain electrode spaced apart from each other, and disposed over the first and second sensing semiconductor patterns.