IP Library Granted Patent US 9,493,888
Granted Patent B2
US 9,493,888 · App. 13/418,665 · Granted Nov 15, 2016

Automated vision system for a crystal growth apparatus

Inventors: Dean C. Skelton (Fitzwilliam, NH); Brett C. Forlano (Avon, CO)
Assignee: GTAT Corporation
C30B11/006C30B29/06C30B29/20
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Quick Facts
Patent No.
US 9,493,888
App. No.
13/418,665
Granted
Nov 15, 2016
Kind
B2
Abstract

Various embodiments of a method for producing a crystalline material in a crucible in a crystal growth apparatus are disclosed. The method comprises, in part, the step of monitoring for remaining solid feedstock in a liquid feedstock melt with an automated vision system positioned above the crucible. Alternatively, or in addition, the method comprises the step of monitoring for solidified crystalline material in a partially solidified melt with the automated vision system. A crystal growth apparatus comprising the automated vision system is also disclosed.

Claims (28)

1. A method of producing a crystalline material comprising the steps of:

i) providing a crucible containing a solid feedstock in a hot zone of a crystal growth apparatus;

ii) heating the solid feedstock in the crucible to form a liquid feedstock melt;

iii) removing heat from the liquid feedstock melt to form a partially solidified melt;

iv) monitoring, during a solidification stage, for solidified crystalline material in the partially solidified melt with an automated vision system positioned above the crucible, wherein when no darker portions are seen by the automated vision system, the automated vision system determines full solidification has occurred;

v) fully solidifying the partially solidified melt to form the crystalline material; and

vi) ending, by the automated vision system, the heat removal upon detecting full solidification by the automated vision system.

2. The method of claim 1 , wherein the crystal growth apparatus is a directional solidification furnace.

3. The method of claim 1 , wherein the partially solidified melt further comprises at least one impurity phase, and wherein the automated vision system monitors for solidified crystalline material in the partially solidified melt without interference from the at least one impurity phase.

4. The method of claim 1 , wherein no solidified crystalline material is detected by the automated vision system in the partially solidified melt, and heat removal is continued until solidified crystalline material is detected by the automated vision system.

5. The method of claim 1 , wherein the automated vision system continuously monitors for solidified crystalline material in the partially solidified melt.

6. The method of claim 1 , wherein the automated vision system is a programmable camera.

7. The method of claim 1 , wherein the automated vision system monitors for solidified crystalline material in a surface center portion of the partially solidified melt.

8. The method of claim 1 , wherein the automated vision system is attached outside the crystal growth apparatus.

9. The method of claim 1 , further comprising the step of annealing the crystalline material.

10. The method of claim 1 , wherein the solid feedstock comprises silicon.

11. The method of claim 10 , wherein the crystalline material is a silicon ingot.

12. The method of claim 1 , wherein the solid feedstock comprises alumina.

13. The method of claim 12 , wherein the crystalline material is sapphire.

14. A method of producing a crystalline material comprising the steps of:

i) providing a crucible containing a solid feedstock in a hot zone of a crystal growth apparatus;

ii) heating the solid feedstock in the crucible to form a liquid feedstock melt;

iii) monitoring, during a melting stage, for remaining solid feedstock in the liquid feedstock melt with an automated vision system positioned above the crucible;

iv) ending, by the automated vision system, the heating of the solid feedstock when no remaining solid feedstock is detected by the automated vision system;

v) removing heat from the liquid feedstock melt to form a partially solidified melt;

vi) monitoring, during a solidification stage, for solidified crystalline material in the partially solidified melt with the automated vision system, wherein when no darker portions are seen by the automated vision system, the automated vision system determines full solidification has occurred;

vii) fully solidifying the partially solidified melt to form the crystalline material; and

viii) ending, by the automated vision system, the heat removal upon detecting full solidification by the automated vision system.

Assignments (7)
RELEASE OF SECURITY INTEREST IN PATENTS, RECORDED AT REEL 058725, FRAME 0379 Recorded Jun 22, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: GTAT CORPORATION, AS GRANTOR; GTAT IP HOLDING LLC, AS GRANTOR
Reel/Frame 064067/0187 →
SECURITY INTEREST Recorded Jan 21, 2022
From: GTAT CORPORATION; GTAT IP HOLDING LLC; BY: GTAT TERRA INC., ITS SOLE MEMBER
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 058725/0379 →
TERMINATION OF SECURITY INTEREST IN PATENT RIGHTS Recorded Oct 29, 2021
From: CANTOR FITZGERALD SECURITIES (AS COLLATERAL AGENT)
To: GTAT CORPORATION
Reel/Frame 057972/0098 →
SECURITY INTEREST Recorded Oct 4, 2018
From: GTAT CORPORATION
To: CANTOR FITZGERALD SECURITIES, AS COLLATERAL AGENT
Reel/Frame 047073/0785 →
RELEASE OF SECURITY INTEREST Recorded May 16, 2017
From: UMB BANK, NATIONAL ASSOCIATION
To: GTAT CORPORATION
Reel/Frame 042479/0517 →
SECURITY INTEREST Recorded Mar 25, 2016
From: GTAT CORPORATION
To: UMB BANK, NATIONAL ASSOCIATION
Reel/Frame 038260/0341 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 16, 2012
From: SKELTON, DEAN C.; FORLANO, BRETT C.
To: GTAT CORPORATION
Reel/Frame 028554/0628 →
Continuity (2)
Provisional Application 61452919 · Mar 15, 2011
Related Publication 20120282162A1 · Nov 8, 2012