Processing support device, method and computer readable storage medium, and semiconductor fabrication support device and method
View Patent ↗Using an equipment-classified processing results database, an intercept satisfying a second predetermined condition is derived from intercepts of straight lines that pass through a reference co-ordinate point, which satisfies a first predetermined condition, and respective co-ordinate points in a region bounded by: a line that passes through the reference co-ordinate point and is parallel to an x-axis representing wafer counts X; a y-axis representing processing durations Y; and a line passing through the reference co-ordinate point and the origin. Of co-ordinate points represented by an equipment and recipe-classified processing results database, a gradient satisfying a third predetermined condition is derived from gradients of lines that pass through the derived intercept and each of all co-ordinate points with wafer counts X at or above a predetermined number. A processing duration is derived using a regression equation into which the derived intercept and the derived gradient are substituted.
1. A processing support device comprising:
a processor;
a memory section that stores
first two-dimensional co-ordinate data that represents
processing object unit counts X of processing targets to which predetermined processing is applied by predetermined equipment and
processing durations Y required for the processing of the unit counts X of the processing targets
as co-ordinate points in two dimensions, and
second two-dimensional co-ordinate data that represents unit counts X and processing durations Y for individual types of the processing as co-ordinate points in two dimensions;
an intercept derivation section that derives, using the processor, an intercept b of a regression equation expressed as the following expression (1)
Y=aX+b (1)
in which the unit count X is an independent variable, the processing duration Y is a dependent variable, and b is an intercept and a is a gradient particular to the equipment,
the intercept b being an intercept that satisfies a second condition among intercepts of lines that pass through a reference co-ordinate point and respective co-ordinate points in a region,
the reference co-ordinate point satisfying a first predetermined condition among the co-ordinate points represented by the first two-dimensional co-ordinate data stored in the memory section, and
the region being bounded by
a line that passes through the reference co-ordinate point and is parallel to an x-axis representing the unit counts X,
a y-axis representing the processing durations Y and
a line that passes through the reference co-ordinate point and the origin;
a gradient derivation section that derives, using the processor, the gradient a, the gradient a being a gradient of a line that satisfies a third predetermined condition among gradients of lines that pass through
the intercept b derived by the intercept derivation section and
each of all co-ordinate points with a unit count X greater than or equal to a predetermined number among the co-ordinate points represented by the second two-dimensional co-ordinate data stored in the memory section; and
a support section that supports, using the processor, the processing using expression (1), into which the intercept b derived by the intercept derivation section and the gradient a derived by the gradient derivation section are substituted,
wherein the first predetermined condition includes conditions that the co-ordinate point is at a maximum value of the unit count X and the processing duration Y falls in a first duration band, and
the first duration band is processing durations Y, among the processing durations Y of co-ordinate points with the maximum value unit count X represented by the first two-dimensional co-ordinate data, of which positions counting from a minimum processing duration Y are proportions relative to a total number of the co-ordinate points with the maximum value unit count X of from 5% to 35%.
2. The processing support device according to claim 1 , wherein the proportions are from 10% to 20%.
3. A processing support device comprising:
a processor;
a memory section that stores
first two-dimensional co-ordinate data that represents
processing object unit counts X of processing targets to which predetermined processing is applied by predetermined equipment and
processing durations Y required for the processing of the unit counts X of the processing targets
as co-ordinate points in two dimensions, and
second two-dimensional co-ordinate data that represents unit counts X and processing durations Y for individual types of the processing as co-ordinate points in two dimensions;
an intercept derivation section that derives, using the processor, an intercept b of a regression equation expressed as the following expression (1)
Y=aX+b (1)
in which the unit count X is an independent variable, the processing duration Y is a dependent variable, and b is an intercept and a is a gradient particular to the equipment,
the intercept b being an intercept that satisfies a second condition among intercepts of lines that pass through a reference co-ordinate point and respective co-ordinate points in a region,
the reference co-ordinate point satisfying a first predetermined condition among the co-ordinate points represented by the first two-dimensional co-ordinate data stored in the memory section, and
the region being bounded by
a line that passes through the reference co-ordinate point and is parallel to an x-axis representing the unit counts X,
a y-axis representing the processing durations Y and
a line that passes through the reference co-ordinate point and the origin;
a gradient derivation section that derives, using the processor, the gradient a, the gradient a being a gradient of a line that satisfies a third predetermined condition among gradients of lines that pass through
the intercept b derived by the intercept derivation section and
each of all co-ordinate points with a unit count X greater than or equal to a predetermined number among the co-ordinate points represented by the second two-dimensional co-ordinate data stored in the memory section; and
a support section that supports, using the processor, the processing using expression (1), into which the intercept b derived by the intercept derivation section and the gradient a derived by the gradient derivation section are substituted,
wherein the second predetermined condition includes a condition that positions counting from a smallest intercept, among intercepts that are objects of judgment of whether or not the second predetermined condition is satisfied, are proportions relative to a total number of the judgment object intercepts of from 5% to 35%.
4. The processing support device according to claim 3 , wherein the proportion relative to the total number of intercepts that are objects of judgment of whether or not the second predetermined condition is satisfied is from 10% to 20%.
5. The processing support device according to claim 1 , wherein the predetermined number is a count of co-ordinate points with values in the top 50%, counting from larger unit count X values, among the co-ordinate points represented by the second two-dimensional co-ordinate data.
6. The processing support device according to claim 5 , wherein
if the total number of co-ordinate points represented by the second two-dimensional co-ordinate data is 1,000 or more, the predetermined number is a number of co-ordinate points with values in the top 10%, counting from larger unit count X values, among the co-ordinate points represented by the second two-dimensional co-ordinate data,
if the total number of co-ordinate points represented by the second two-dimensional co-ordinate data is between 10 and 1,000, the predetermined number is a number of co-ordinate points with values in the top 50%, counting from larger unit count X values, among the co-ordinate points represented by the second two-dimensional co-ordinate data, and
if the total number of co-ordinate points represented by the second two-dimensional co-ordinate data is 10 or less, the predetermined number is the total number.
7. A processing support device comprising:
a processor;
a memory section that stores
first two-dimensional co-ordinate data that represents
processing object unit counts X of processing targets to which predetermined processing is applied by predetermined equipment and
processing durations Y required for the processing of the unit counts X of the processing targets
as co-ordinate points in two dimensions, and
second two-dimensional co-ordinate data that represents unit counts X and processing durations Y for individual types of the processing as co-ordinate points in two dimensions;
an intercept derivation section that derives, using the processor, an intercept b of a regression equation expressed as the following expression (1)
Y=aX+b (1)
in which the unit count X is an independent variable, the processing duration Y is a dependent variable, and b is an intercept and a is a gradient particular to the equipment,
the intercept b being an intercept that satisfies a second condition among intercepts of lines that pass through a reference co-ordinate point and respective co-ordinate points in a region,
the reference co-ordinate point satisfying a first predetermined condition among the co-ordinate points represented by the first two-dimensional co-ordinate data stored in the memory section, and
the region being bounded by
a line that passes through the reference co-ordinate point and is parallel to an x-axis representing the unit counts X,
a y-axis representing the processing durations Y and
a line that passes through the reference co-ordinate point and the origin;
a gradient derivation section that derives, using the processor, the gradient a, the gradient a being a gradient of a line that satisfies a third predetermined condition among gradients of lines that pass through
the intercept b derived by the intercept derivation section and
each of all co-ordinate points with a unit count X greater than or equal to a predetermined number among the co-ordinate points represented by the second two-dimensional co-ordinate data stored in the memory section; and
a support section that supports, using the processor, the processing using expression (1), into which the intercept b derived by the intercept derivation section and the gradient a derived by the gradient derivation section are substituted,
wherein the third predetermined condition includes a condition that a position counting from a smallest gradient, among gradients that are objects of judgment of whether or not the third predetermined condition is satisfied, is a proportion relative to a total number of the judgment object gradients of from 10% to 40%.
8. The processing support device according to claim 7 , wherein the proportion relative to the total number of gradients that are objects of judgment of whether or not the third predetermined condition is satisfied is from 10% to 20%.
9. The processing support device according to claim 1 , wherein the support section supports, using the processor, the processing by substituting a unit count X into expression (1), into which the intercept b derived by the intercept derivation section and the gradient a derived by the gradient derivation section are substituted, and calculating, using the processor, the processing duration Y.
10. The processing support device according to claim 1 , wherein the co-ordinate points are two-dimensional co-ordinate points according to unit counts X and processing durations Y indicated by an instructor who instructs the equipment to execute the processing.
11. A semiconductor fabrication support device comprising:
a processing support device according to claim 1 ; and
a prediction section that predicts an end time of processing using the support section,
wherein the processing targets are semiconductors.
12. The semiconductor fabrication support device according to claim 11 , wherein
the processing includes processing that conveys the semiconductors, and
the prediction section predicts a time at which the semiconductors will arrive at a conveyance destination.
13. The semiconductor fabrication support device according to claim 11 , wherein the prediction section predicts a processing duration Y using the support section, and
the semiconductor fabrication support device further includes a verification section that, using the processing duration Y predicted by the prediction section, performs at least one of a verification of performance of the equipment and a verification of a duration that is actually required for the processing.
14. A processing support method comprising:
registering, by storing in a memory section,
first two-dimensional co-ordinate data that represents
processing object unit counts X of processing targets to which predetermined processing is applied by predetermined equipment and
processing durations Y required for the processing of the unit counts X of the processing targets
as co-ordinate points in two dimensions, and
second two-dimensional co-ordinate data that represents unit counts X and processing durations Y for individual types of the processing as co-ordinate points in two dimensions;
deriving, using a processor, an intercept b of a regression equation expressed as the following expression ( 1 )
Y=aX+b (1)
in which the unit count X is an independent variable, the processing duration Y is a dependent variable, and b is an intercept and a is a gradient particular to the equipment,
the intercept b being an intercept that satisfies a second condition among intercepts of lines that pass through a reference co-ordinate point and respective co-ordinates in a region,
the reference co-ordinate point satisfying a first predetermined condition among the co-ordinate points represented by the first two-dimensional co-ordinate data stored in the memory section, and
the region being bounded by
a line that passes through the reference co-ordinate point and is parallel to an x-axis representing the unit counts X,
a y-axis representing the processing durations Y and
a line that passes through the reference co-ordinate point and the origin;
deriving, using the processor, the gradient a, the gradient a being a gradient of a line that satisfies a third predetermined condition among gradients of lines that pass through
the derived intercept b and
each of all co-ordinate points with a unit count X greater than or equal to a predetermined number among the co-ordinate points represented by the second two-dimensional co-ordinate data stored in the memory section; and
supporting, using the processor, the processing using expression (1), into which the derived intercept b and the derived gradient a are substituted,
wherein the first predetermined condition includes conditions that the co-ordinate point is at a maximum value of the unit count X and the processing duration Y falls in a first duration band, and
the first duration band is processing durations Y, among the processing durations Y of co-ordinate points with the maximum value unit count X represented by the first two-dimensional co-ordinate data, of which positions counting from a minimum processing duration Y are proportions relative to a total number of the co-ordinate points with the maximum value unit count X of from 5% to 35%.
15. A semiconductor fabrication support method comprising:
a processing support method according to claim 14 ; and
predicting, using the processor, an end time of processing, by the supporting step,
wherein the processing targets are semiconductors.
16. A non-transitory computer readable medium storing a program causing a computer to execute a process for supporting processing, the process comprising:
registering, by storing in a memory section,
first two-dimensional co-ordinate data that represents
processing object unit counts X of processing targets to which predetermined processing is applied by predetermined equipment and
processing durations Y required for the processing of the unit counts X of the processing targets
as co-ordinate points in two dimensions, and
second two-dimensional co-ordinate data that represents unit counts X and processing durations Y for individual types of the processing as co-ordinate points in two dimensions;
deriving an intercept b of a regression equation expressed as the following expression (1)
Y=aX+b (1)
in which the unit count X is an independent variable, the processing duration Y is a dependent variable, and b is an intercept and a is a gradient particular to the equipment,
the intercept b being an intercept that satisfies a second condition among intercepts of lines that pass through a reference co-ordinate point and respective co-ordinates in a region,
the reference co-ordinate point satisfying a first predetermined condition among the co-ordinate points represented by the first two-dimensional co-ordinate data stored in the memory section, and
the region being bounded by
a line that passes through the reference co-ordinate point and is parallel to an x-axis representing the unit counts X,
a y-axis representing the processing durations Y and
a line that passes through the reference co-ordinate point and the origin;
deriving the gradient a, the gradient a being a gradient of a line that satisfies a third predetermined condition among gradients of lines that pass through
the derived intercept b and
each of all co-ordinate points with a unit count X greater than or equal to a predetermined number among the co-ordinate points represented by the second two-dimensional co-ordinate data stored in the memory section; and
supporting the processing using expression (1), into which the derived intercept b and the derived gradient a are substituted,
wherein the first predetermined condition includes conditions that the co-ordinate point is at a maximum value of the unit count X and the processing duration Y falls in a first duration band, and
the first duration band is processing durations Y, among the processing durations Y of co-ordinate points with the maximum value unit count X represented by the first two-dimensional co-ordinate data, of which positions counting from a minimum processing duration Y are proportions relative to a total number of the co-ordinate points with the maximum value unit count X of from 5% to 35%.