Method of manufacturing organic electroluminescence display device
A method of manufacturing an organic electroluminescence display device includes an organic compound layer which is placed between a pair of electrodes and includes at least an emission layer, the organic compound layer being two-dimensionally arranged, includes forming the organic compound layer which is insoluble in water in an entire emission region on a substrate, providing a mask layer containing a water-soluble material in at least a part of a region on the organic compound layer, removing a part of the organic compound layer which is provided in a region which is other than the region in which the mask layer is provided, removing the mask layer, and forming, after the removing of the mask layer, a layer containing at least an alkali metal or an alkaline-earth metal in a region including at least the emission region.
1. A method of manufacturing an organic electroluminescence display device including multiple electroluminescence elements, each of the multiple electroluminescence elements including a first electrode and a second electrode and an organic compound layer provided between the first electrode and the second electrode, the organic compound layer including at least an emission layer, the method comprising:
forming on a substrate having the first electrode provided thereon the organic compound layer which is insoluble in water;
forming, on the organic compound layer, a first mask layer comprising a water-soluble material and a second mask layer comprising silicon nitride or silicon oxide in this order;
forming a resist layer on the second mask layer to conduct patterning using photolithography;
removing a part of the organic compound layer, the second mask layer, and the first mask layer, which are formed in a region in which the resist layer is not provided;
removing the first mask layer by contact with a solvent containing water;
forming, after the removing of the first mask layer, a continuous layer containing one of an alkali metal and an alkaline-earth metal over the multiple electroluminescence elements; and
forming the second electrode on the layer containing one of the alkali metal and the alkaline-earth metal.
2. The method of manufacturing an organic electroluminescence display device according to claim 1 , wherein the organic compound layer and the first and second mask layers are continuously formed in a vacuum atmosphere.
3. The method of manufacturing an organic electroluminescence display device according to claim 1 , wherein:
the layer containing one of the alkali metal and the alkaline-earth metal comprises an electron injection layer containing an organic compound and one of an alkali metal and an alkaline-earth metal.
4. The method of manufacturing an organic electroluminescence display device according to claim 1 , wherein the organic compound layer is formed by vacuum deposition.
5. A method of manufacturing an organic electroluminescence display device including multiple electroluminescence elements, each of the multiple electroluminescence elements including a first electrode and a second electrode and an organic compound layer provided between the first electrode and the second electrode, the organic compound layer including at least an emission layer, the method comprising:
forming on a substrate having the first electrode provided thereon the organic compound layer which is insoluble in water;
providing a mask layer containing a water-soluble material using photolithography in a part of a region in which the organic compound layer is formed;
removing a part of the organic compound layer which is formed in a region in which the mask layer is not provided;
removing the mask layer by contact with a solvent containing water;
forming, after the removing of the mask layer, a continuous layer containing one of an alkali metal and an alkaline-earth metal over the multiple electroluminescence elements; and
forming the second electrode on the layer containing one of the alkali metal and the alkaline-earth metal.
6. The method of manufacturing an organic electroluminescence display device according to claim 5 , wherein the organic compound layer and the first and second mask layers are continuously formed in a vacuum atmosphere.
7. The method of manufacturing an organic electroluminescence display device according to claim 5 , wherein the layer containing one of the alkali metal and the alkaline-earth metal comprises an electron injection layer containing an organic compound and one of an alkali metal and an alkaline-earth metal.