IP Library Granted Patent US 8,756,795
Granted Patent B1
US 8,756,795 · App. 13/426,438 · Granted Jun 24, 2014

Method for manufacturing a read head having conductive filler in insulated hole through substrate

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Quick Facts
Patent No.
US 8,756,795
App. No.
13/426,438
Granted
Jun 24, 2014
Kind
B1
Abstract

A method for manufacturing a read head includes the step of depositing a conductive filler into a plurality of holes that extend through a wafer. Each of the holes extends from a wafer top surface to a wafer bottom surface. Each of the holes includes an inner surface that includes an insulative layer. The method further includes the steps of fabricating a read transducer on the wafer top surface, and depositing a plurality of electrically conductive leading connection pads on the wafer bottom surface. The plurality of electrically conductive leading connection pads are in electrical contact with the conductive filler.

Claims (10)

1. A method for manufacturing a read head, the method comprising:

depositing a conductive filler into a plurality of holes that extend through a wafer, each of the holes extending from a wafer top surface to a wafer bottom surface, each of the holes including an inner surface that includes an insulative layer;

fabricating a read transducer on the wafer top surface;

depositing a plurality of electrically conductive leading connection pads on the wafer bottom surface, the plurality of electrically conductive leading connection pads being in electrical contact with the conductive filler.

2. The method of claim 1 further comprising cutting the wafer into a plurality of read heads.

3. The method of claim 1 wherein fabricating the read transducer includes depositing a top surface insulative layer on the wafer top surface.

4. The method of claim 1 further comprising grinding the wafer bottom surface to reduce an overall thickness of the wafer by at least 300 μm.

5. The method of claim 4 further comprising depositing a bottom surface insulative layer on the wafer bottom surface, and then patterned the bottom surface insulative layer the conductive filler is exposed, before depositing the plurality of electrically conductive leading connection pads thereon.

6. The method of claim 5 wherein depositing the plurality of electrically conductive leading connection pads comprises depositing a seed layer and then plating pad material upon the seed layer.

7. The method of claim 1 further comprising heating the wafer to adhere the conductive filler within the plurality of holes.

Assignments (6)
RELEASE OF SECURITY INTEREST AT REEL 038710 FRAME 0845 Recorded Feb 8, 2022
From: JPMORGAN CHASE BANK, N.A.
To: WESTERN DIGITAL (FREMONT), LLC; WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 058965/0445 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 19, 2019
From: WESTERN DIGITAL (FREMONT), LLC
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 050450/0582 →
RELEASE OF SECURITY INTEREST Recorded Mar 5, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: WESTERN DIGITAL (FREMONT), LLC
Reel/Frame 045501/0158 →
SECURITY AGREEMENT Recorded May 16, 2016
From: WESTERN DIGITAL (FREMONT), LLC
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 038710/0845 →
SECURITY AGREEMENT Recorded May 16, 2016
From: WESTERN DIGITAL (FREMONT), LLC
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038744/0675 →
SECURITY AGREEMENT Recorded May 16, 2016
From: WESTERN DIGITAL (FREMONT), LLC
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 038744/0755 →