Display device and method for manufacturing the display device
A metal layer is formed on a highly light-transmissive substrate; a resist mask having an opening pattern is formed on the metal layer; exposed portions of the metal layer is etched away in this state to form openings; then the resist mask is removed; and a surface of the metal layer and an inner side wall of each of the openings are oxidized to form a metal oxide layer. Thus, a front surface and a rear surface of the aperture plate are caused to have different reflectances. The oxide layer is formed at the same time as when the resist mask is ashed to remove resist.
1. A display device comprising:
a MEMS shutter array provided over a front surface of a backlight unit for radiating light, the MEMS shutter array including MEMS shutters for restricting, by an open/close operation thereof, passage of the light radiated from the backlight unit; and
an aperture plate provided between the backlight unit and the MEMS shutter array, the aperture plate including a metal layer having openings in positions corresponding to the MEMS shutters and also including a metal oxide layer on a surface of the metal layer facing the MEMS shutters, wherein the metal oxide layer is also on an inner side wall of each of the openings in the metal layer.
2. A display device according to claim 1 , wherein the metal oxide layer is a layer of an oxide of a metal material used to form the metal layer.
3. A display device according to claim 1 , wherein a surface of the aperture plate facing the MEMS shutter array has a reflectance of 50% or lower.
4. A display device according to claim 1 , wherein the metal layer includes silver.
5. A display device according to claim 1 , wherein the metal layer includes a silver alloy.
6. A display device according to claim 4 , wherein the metal oxide layer is a layer of silver oxide.
7. A display device according to claim 1 , wherein the openings are filled with a transparent insulating substance.
8. A display device according to claim 7 , wherein
the surface of the aperture plate is covered with the transparent insulating substance to form a flat film having a flat surface; and
the MEMS shutter array is constructed on the surface of the film of the transparent insulating substance.
9. A display device according to claim 1 , wherein
the backlight unit sequentially radiates light of three primary colors of red, green and blue; and
the MEMS shutters are driven in correspondence with each of the colors to adjust amount of lights which are to pass the MEMS shutters among the lights transmitted through the openings.
10. An aperture plate provided between a backlight unit for radiating light and a MEMS shutter array including MEMS shutters for controlling, by an open/close operation thereof, the aperture plate comprising:
a metal layer having openings in positions corresponding to the MEMS shutters; and
a metal oxide layer on a surface of the metal layer facing the MEMS shutters, wherein the metal oxide layer is also on an inner side wall of each of the openings in the metal layer.
11. An aperture plate according to claim 10 , wherein the oxide layer is a result of oxidation of the surface of the metal layer.