A catheter die is provided and includes an elongate body having first and second opposing end portions and an end face at the first one of the first and second opposing end portions. The elongate body defines a cavity within the first end portion with an interior facing surface of the cavity disposed to extend alongside at least a portion of the first end face. At least one or more piezoresistive pressure sensors are operably disposed proximate to the cavity.
1. A catheter die, comprising:
an elongate body having a first end portion, a second end portion, and an end face at the first end portion, the elongate body defining a cavity completely enclosed within the first end portion with an interior facing surface of the cavity disposed to extend alongside at least a portion of the end face of the first end portion; and
at least one or more piezoresistive pressure sensors operably disposed proximate to the cavity.
2. The catheter die according to claim 1 , further comprising at least one or more bond pads respectively disposed in electrical communication with the at least one or more piezoresistive pressure sensors.
3. The catheter die according to claim 2 , wherein each of the at least one or more bond pads extends along a longitudinal length of the elongate body.
4. The catheter die according to claim 2 , wherein each of the at least one or more bond pads extends along a metalized channel formed along a longitudinal length of the elongate body.
5. The catheter die according to claim 1 , wherein the end face is about 0.3-0.5 mm by about 0.3-0.5 mm and a longitudinal length of the elongate body is about 0.8-1.2 mm.
6. The catheter die according to claim 1 , wherein the cavity is defined as a frusto-trapezoidal volume.
7. The catheter die according to claim 1 , wherein the end face is oriented normally with respect to a longitudinal axis of the elongate body.
8. The catheter die according to claim 1 , wherein a normal angle of the end face is oriented transversely with respect to a longitudinal axis of the elongate body.
9. A catheter die, comprising:
an elongate body having sidewalls, longitudinal first and second opposing end portions of the sidewalls and an end face at the longitudinal first end portion,
the sidewalls having a longitudinal length that is larger than any planar dimension of the end face,
the elongate body defining a cavity having an interior facing surface proximate to the end face such that a portion of the end face is defined as a diaphragm,
the interior facing surface being disposed alongside at least a portion of the end face; and
at least one or more piezoresistive pressure sensors operably disposed proximate to the diaphragm and the cavity.
10. The catheter die according to claim 9 , further comprising at least one or more bond pads respectively disposed in electrical communication with the at least one or more piezoresistive pressure sensors.
11. The catheter die according to claim 10 , wherein each of the at least one or more bond pads extends along at least a portion of one of the sidewalls.
12. The catheter die according to claim 10 , wherein each of the at least one or more bond pads extends along a metalized channel formed in at least a portion of one of the sidewalls.
13. The catheter die according to claim 9 , wherein the end face is about 0.3-0.5 mm by about 0.3-0.5 mm and at least one of the sidewalls is about 0.3-0.5 mm by about 0.8-1.2 mm.
14. The catheter die according to claim 9 , wherein a magnitude of the longitudinal length is about 2.5-3.0 times a magnitude of any planar dimension of the end face.
15. The catheter die according to claim 9 , wherein the cavity is defined as a frusto-trapezoidal volume.
16. The catheter die according to claim 9 , wherein the end face forms a right angle with at least two opposing sidewalls.
17. The catheter die according to claim 9 , wherein the end face forms an obtuse angle with a first one of the sidewalls and an acute angle with a second one of the sidewalls, which opposes the first one of the sidewalls.
18. A method of assembling a catheter die, comprising:
forming an elongate body having a first end portion, a second end portion opposing the first end portion, and an end face at the first end portion, the elongate body having a longitudinal length that is larger than any planar dimension of the end face;
defining a cavity completely enclosed within the first end portion such that an interior facing surface of the cavity is disposed alongside at least a portion of the end face; and
operably disposing a piezoresistive pressure sensor proximate to the cavity.
19. The method according to claim 18 , wherein the forming comprises forming a metalized channel along a longitudinal length of the elongate body, and the method further comprises disposing a bond pad along the metalized channel and in electrical communication with the piezoresistive pressure sensor.
20. The method according to claim 18 , wherein the end face is oriented one of substantially normally with respect to a longitudinal axis of the elongate body or transversely with respect to a longitudinal axis of the elongate body.
21. The catheter die according to claim 1 , wherein the interior facing surface is proximate to the end face such that a portion of the end face is defined as a diaphragm.
22. The method according to claim 18 , wherein the interior facing surface is proximate to the end face such that a portion of the end face is defined as a diaphragm.
23. A method of detecting pressure, comprising:
(a) providing a catheter die comprising:
an elongate body having first and second opposing end portions and an end face at the first end portion, the elongate body defining a cavity within the first end portion with an interior facing surface of the cavity disposed to extend alongside at least a portion of the end face of the first end portion, wherein the interior facing surface is proximate to the end face such that a portion of the end face is defined as a diaphragm which deforms in accordance with a pressure differential between an interior of the cavity and an exterior of the cavity; and
at least one or more piezoresistive pressure sensors operably disposed proximate to the cavity such that said at least one or more piezoelectric pressure sensors experience strain when the diaphragm deforms;
(b) exposing the catheter die to the pressure to be measured to cause the diaphragm to deform in accordance with the pressure differential; and
(c) detecting the pressure using the at least one or more piezoresistive pressure sensors.