Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using thin film deposition apparatus
View Patent ↗A thin film deposition apparatus to remove static electricity generated between a substrate and a mask, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus.
1. A thin film deposition apparatus comprising:
a holder configured to support a substrate; and
a static electricity remover connected to a mask to remove static electricity generated between the substrate and the mask, the mask being arranged to face a surface of the substrate;
wherein the static electricity remover is configured to remove static electricity by supplying a current to the mask at a predetermined frequency;
wherein the static electricity remover comprises:
a power source configured to supply current to the mask;
a resistor configured to adjust an amount of the current; and
a wire connected to the power source, the resistor, and the mask, to form a closed circuit.
2. The thin film deposition apparatus of claim 1 , wherein the static electricity remover is configured to supply current to the mask for a predetermined amount of time.