Light emitting device and method of manufacturing the same
View Patent ↗Provided is a light emitting device and a method of manufacturing the same. The light emitting device comprises a transparent substrate, an n-type compound semiconductor layer formed on the transparent substrate, an active layer, a p-type compound semiconductor layer, and a p-type electrode sequentially formed on a first region of the n-type compound semiconductor layer, and an n-type electrode formed on a second region separated from the first region of the n-type compound semiconductor layer, wherein the p-type electrode comprises first and second electrodes, each electrode having different resistance and reflectance.
1. A method of manufacturing for a light emitting device, comprising:
sequentially forming an n-type compound semiconductor layer, an active layer and a p-type compound semiconductor layer on a transparent substrate;
forming a metal compound film on the p-type compound semiconductor layer, forming
a conductive reflection film on the metal compound film; and
oxidizing the metal compound film to form a contact resistance reducing film, after forming a conductive reflection film.
2. The method of claim 1 , further comprising exposing a predetermined portion of the n-type compound semiconductor layer by removing a predetermined portion of the conductive reflection film, the metal compound film, the p-type compound semiconductor layer, and the active layer, after the step of forming the conductive refection film.
3. The method of claim 2 , further comprising forming an n-type electrode on the exposed region of the n-type compound semiconductor layer, after performing one of the exposing a predetermined portion of the n-type compound semiconductor layer and oxidizing the metal compound film.
4. The method of claim 1 , where the conductive reflection film is formed of one selected from the group consisting of silver (Ag), aluminum (Al), rhodium (Rh), and tin (Sn).
5. The method of claim 1 , where after oxidizing the metal compound film, a resultant in which the oxidized metal compound film is annealed under a nitrogen atmosphere.
6. The method of claim 1 , the metal compound film is lanthanum nickel (LaNi) film.