Etchant for metal layer including copper or a copper alloy, method of manufacturing a display substrate using the same and display substrate
View Patent ↗An etchant includes about 50% by weight to about 70% by weight of phosphoric acid, about 1% by weight to about 5% by weight of nitric acid, about 10% by weight to about 20% by weight of acetic acid, about 0.1% by weight to about 2% by weight of a corrosion inhibition agent including an azole-based compound and a remainder of water.
1. An etchant comprising:
about 50% by weight to about 70% by weight of phosphoric acid;
about 1% by weight to about 5% by weight of nitric acid;
about 10% by weight to about 20% by weight of acetic acid;
about 0.1% by weight to about 2% by weight of a corrosion inhibition agent including an azole-based compound;
an additive including one of a surfactant or a sequestering agent; and
a remainder of water.
2. The etchant of claim 1 , wherein the corrosion inhibition agent includes at least one selected from the group consisting of aminotetrazole, benzotriazole, tolytriazole, pyrazole, pyrrole, imidazole, 2-methyl imidazole, 2-ethyl imidazole, 2-propyl imidazole, 2-amino imidazole, 4-metyl imidazole, 4-ethyl imidazole and 4-propyl imidazole.
3. The etchant of claim 1 , wherein the corrosion inhibition agent includes benzotriazole.
4. The etchant of claim 1 , further comprising about 0.2% by weight to about 2% by weight of a fluorine-containing compound.
5. The etchant of claim 1 , wherein the additive is included in an amount of about 0.0001% to about 0.01% by weight.
6. A method of manufacturing a display substrate, the method comprising:
forming a metal layer including copper or a copper alloy on a substrate; and
forming a metal pattern by patterning the metal layer using an etchant, the etchant comprising about 50% by weight to about 70% by weight of phosphoric acid, about 1% by weight to about 5% by weight of nitric acid, about 10% by weight to about 20% by weight of acetic acid, about 0.1% by weight to about 2% by weight of a corrosion inhibition agent including an azole-based compound, an additive including one of a surfactant or a sequestering agent and a remainder of water.
7. The method of claim 6 , wherein the corrosion inhibition agent includes at least one selected from the group consisting of aminotetrazole, benzotriazole, tolytriazole, pyrazole, pyrrole, imidazole, 2-methyl imidazole, 2-ethyl imidazole, 2-propyl imidazole, 2-amino imidazole, 4-metyl imidazole, 4-ethyl imidazole and 4-propyl imidazole.
8. The method of claim 6 , wherein the corrosion inhibition agent includes benzotriazole.
9. The method of claim 6 , wherein the etchant further comprises about 0.2% by weight to about 2% by weight of a fluorine-containing compound.
10. The method of claim 6 , wherein the metal layer includes one of a single-layered structure including a copper layer or a copper alloy layer, a double-layered structure including a copper layer or a copper alloy layer disposed on a molybdenum layer, a double-layered structure including a copper layer or copper alloy layer disposed on a titanium layer, a double-layered structure including a copper layer or copper alloy layer disposed on a molybdenum alloy layer or a double-layered structure including a copper layer or a copper alloy layer disposed on a titanium alloy layer.
11. The method of claim 6 , wherein the forming of the metal pattern comprises forming a protective layer on an etched surface of the metal pattern, and wherein the protective layer includes benzotriazole combined with the copper or the copper alloy.
12. The method of claim 6 , wherein the forming of the metal layer comprises forming a gate metal layer on the substrate, and the gate metal layer is patterned by the etchant to form a gate line and a gate electrode.
13. The method of claim 6 , wherein the forming of the metal layer comprises forming a data metal layer on the substrate, and the data metal layer is patterned by the etchant to form a data line, a source electrode and a drain electrode.