Thin-film semiconductor device and method of manufacturing the same
A method of manufacturing a thin-film semiconductor device according to the present disclosure includes: preparing a substrate; forming a gate electrode above the substrate; forming a first insulating film on the gate electrode; forming a semiconductor thin film that is to be a channel layer, on the first insulating film; forming a second insulating film on the semiconductor thin film; irradiating the second insulating film with a beam so as to increase a transmittance of the second insulating film; and forming a source electrode and a drain electrode above the channel layer.
1. A method of manufacturing a thin-film semiconductor device, comprising:
preparing a substrate;
forming a gate electrode above the substrate;
forming a first insulating film on the gate electrode;
forming a semiconductor thin film that is to be a channel layer, on the first insulating film;
forming a second insulating film, that is formed of an organic material film, on the semiconductor thin film;
irradiating the second insulating film with a beam to increase a transmittance of the second insulating film; and
forming a source electrode and a drain electrode above the channel layer,
wherein in the irradiating, the second insulating film is mineralized by irradiation of the beam.
2. The method of manufacturing a thin-film semiconductor device according to claim 1 ,
wherein in the forming of a second insulating film, the second insulating film is formed using an organic material having a transmittance of below 37 percent for the beam, and
in the irradiating, the transmittance of the second insulating film is increased to 37 percent or more through irradiation of the beam.
3. The method of manufacturing a thin-film semiconductor device according to claim 1 ,
wherein in the forming of a semiconductor thin film, the semiconductor thin film formed is noncrystalline, and
in the irradiating, the second insulating film is irradiated with the beam from above to crystallize the semiconductor thin film under the second insulating film.
4. The method of manufacturing a thin-film semiconductor device according to claim 1 ,
wherein in the forming of a semiconductor thin film, the semiconductor thin film formed is noncrystalline, and
the method further comprises crystallizing the semiconductor thin film between the irradiating and the forming of a source electrode and a drain electrode.
5. The method of manufacturing a thin-film semiconductor device according to claim 1 , wherein in the forming of a semiconductor thin film, the semiconductor thin film formed is crystallized.
6. The method of manufacturing a thin-film semiconductor device according to claim 1 , wherein before irradiation of the beam, a product of an absorption coefficient of the second insulating film and a film thickness of the second insulating film is greater than 1.
7. The method of manufacturing a thin-film semiconductor device according to claim 1 , wherein after irradiation of the beam, a product of an absorption coefficient of the second insulating film and a film thickness of the second insulating film is 1 or less.
8. The method of manufacturing a thin-film semiconductor device according to claim 1 , wherein the second insulating film is mineralized when the beam causes photoreaction or thermal reaction to progress in the second insulating film.
9. The method of manufacturing a thin-film semiconductor device according to claim 1 , wherein a wavelength of a beam ranges from 190 nm to 350 nm.
10. The method of manufacturing a thin-film semiconductor device according to claim 1 , wherein the second insulating film is transparentized, and is irradiated at the same time as the semiconductor thin film.
11. The method of manufacturing a thin-film semiconductor device according to claim 1 , wherein at least a part of the source electrode and the drain electrode is above the second insulating film.
12. The method of manufacturing a thin-film semiconductor device according to claim 1 , wherein the second insulating film is opaque and transparentized by the beam irradiation.