Integrated plasmonic sensing device and apparatus
An integrated plasmonic sensing device is monolithically integrated and provides marker-free detection (eliminating the need to use fluorescent or absorbing markers) and in-situ monitoring of conditions at each detection region. The integrated plasmonic sensing device includes a plasmonic backplane disposed on a monolithically integrated image sensor. One or more plasmonic scattering regions and one or more plasmonic via regions laterally offset from the plasmonic scattering regions are provided in the plasmonic sensing device. Guided plasmonic modes mediate power transfer through the plasmonic backplane to one or more underlying image sensor pixels.
1. A method of manufacturing a monolithic sensor comprising the steps of:
providing an image sensor having a plurality of photodetectors,
coating the image sensor with a dielectric material,
stamp forming features in the dielectric material coated on the image sensor,
coating the stamped dielectric material with a metal to at least in part form a plasmonic backplane having a plurality of measurement regions, with at least some of the measurement regions having plasmonic scattering features formed from the metal coated stamped dielectric material, and
defining plasmon vias that connect the plasmonic scattering features to at least some of the plurality of photodetectors of the image sensor.
2. A method of manufacturing a sensor in accordance with claim 1 , further comprising the step forming a fluid chamber over the plasmonic backplane.
3. A method of manufacturing a sensor in accordance with claim 1 , further comprising the step of connecting more than one of the plurality of photodetectors to one of the plurality of measurement regions by one or more plasmon vias.
4. A method of manufacturing a sensor in accordance with claim 1 , further comprising the step of connecting more than one of plurality of measurement regions to one of the plurality of photodetectors by one or more plasmon vias.
5. A method of manufacturing a sensor in accordance with claim 1 , further comprising the step of positioning at least some of the plurality of measurement regions laterally offset from and connected to one or more photodetectors by one or more plasmon vias.
6. A method of manufacturing a sensor in accordance with claim 1 , further comprising the step of attaching tethered molecules for molecular recognition of biological or chemical substances to at least some of the plurality of measurement regions.