Substrate sealing apparatus and method of sealing substrate using the same
View Patent ↗A substrate sealing apparatus includes a chamber, at least one lower compressing member, and at least one lower compressing member. The lower compressing member includes a lower compressing surface for emitting heat, is configured to be elevated up and lowered down in a vertical direction with respect to the compressing surface, and rotates about the vertical direction. The upper compressing member includes a lower compressing surface for emitting heat, and is configured to be elevated up and lowered down in the vertical direction.
1. A method of sealing a substrate using a lower compressing member provided in a chamber and an upper compressing member provided on the lower compressing member, the method comprising:
providing a primary sealed substrate in the chamber;
lowering the lower compressing member to compress the primary sealed substrate primarily;
elevating the lower compressing member;
rotating the lower compressing member about an axis up which the lower compressing member is elevated so as to space the lower compressing member apart from the upper compressing member in a plane;
and lowering the upper compressing member to secondarily compress the primary sealed substrate.
2. The method as claimed in claim 1 , wherein, when the primary sealed substrate is primarily compressed, the lower compressing member is disposed parallel to a first direction such that a first sealing pattern is formed on the primary sealed substrate along the first direction of the primary sealed substrate.
3. The method as claimed in claim 2 , wherein, when the primary sealed substrate is secondarily compressed, the upper compressing member is disposed in a second direction different from the first direction such that a second sealing pattern is formed on the primary sealed substrate along the second direction.
4. The method as claimed in claim 3 , wherein there are a plurality of the lower compressing members and a plurality of the upper compressing members so that a plurality of the first sealing patterns and the second sealing patterns are formed on the primary sealed substrate and that the plurality of the first sealing patterns are partially overlapped with the plurality of the second sealing patterns.
5. The method as claimed in claim 3 , wherein the primary sealed substrate is formed by laminating a sealing film and a donor film by interposing a substrate and each of the first sealing patterns and the second sealing patterns is defined by which the sealing film is combined with the donor film.
6. The method as claimed in claim 5 , wherein the first sealing patterns are formed in correspondence with two sides extending in the first direction of the primary sealed substrate respectively, the second sealing patterns are formed in correspondence with two sides extending in the second direction of the primary sealed substrate, and the first sealing patterns are partially overlapped with the second sealing patterns in the plane.
7. The method as claimed in claim 1 , further comprising supplying current to each of the upper compressing member and the lower compressing member to heat the upper compressing member and the lower compressing member.
8. The method as claimed in claim 1 , wherein the inside of the chamber is under vacuum.