IP Library Granted Patent US 9,018,032
Granted Patent B2
US 9,018,032 · App. 13/445,997 · Granted Apr 28, 2015

CIGS solar cell structure and method for fabricating the same

Inventors: Hsuan-Sheng Yang (Taichung, TW); Wen-Chin Lee (Hsinchu, TW); Li-Huan Chu (Hsin Chu, TW)
Assignee: TSMC Solar Ltd.
H01L21/02491H01L21/02568H01L21/02614H01L31/0322H01L31/0749Y02E10/541
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Quick Facts
Patent No.
US 9,018,032
App. No.
13/445,997
Granted
Apr 28, 2015
Kind
B2
Abstract

A method for manufacturing a CIGS thin film photovoltaic device includes forming a back contact layer on a substrate, forming an Se-rich layer on the back contact layer, forming a precursor layer on the Se-rich layer by depositing copper, gallium and indium resulting in a first interim structure, annealing or selenizing the first interim structure, thereby forming Cu/Se, Ga/Se or CIGS compounds along the interface between the back contact layer and the precursor layer and resulting in a second interim structure, and selenizing the second interim structure, thereby converting the precursor layer into a CIGS absorber layer on the back contact layer.

Claims (30)

1. A method for manufacturing a thin film photovoltaic device comprising the steps of:

(a) forming a back contact layer on a substrate;

(b) forming an Se-rich layer on the back contact layer;

(c) forming a precursor layer on the Se-rich layer by depositing copper, gallium and indium resulting in a first interim structure;

(d) annealing the first interim structure, thereby forming Cu/Se, Ga/Se or CIGS compounds along the interface between the back contact layer and the precursor layer and resulting in a second interim structure; and

(e) selenizing the second interim structure, thereby converting the precursor layer into a CIGS absorber layer on the back contact layer.

2. The method of claim 1 , wherein the step (e) further includes sulfurizing the second interim structure concurrently with the selenizing step.

3. The method of claim 1 , wherein the forming of the Se-rich layer comprises depositing a film of Se.

4. The method of claim 1 , wherein the forming of the Se-rich layer comprises depositing a film of MoSe compound.

5. The method of claim 1 , wherein the forming of the Se-rich layer comprises depositing a film of InSe compound.

6. The method of claim 1 , wherein the forming of the Se-rich layer comprises depositing a film of CuSe compound.

7. The method of claim 1 , wherein the forming of the Se-rich layer comprises depositing a film of GaSe compound.

8. The method of claim 1 , wherein the annealing is conducted at a temperature in a range between 300° C. and 600° C.

9. The method of claim 1 , wherein the CIGS absorber layer has an Se concentration of 30 to 60 atomic % along its interface with the back contact layer.

10. The method of claim 1 , wherein the second interim structure is selenized in H 2 Se.

11. The method of claim 2 , wherein the second interim structure is sulferized in H 2 S.

12. A method for manufacturing a thin film photovoltaic device comprising the steps of:

(a) forming a back contact layer on a substrate;

(b) forming an Se-rich layer on the back contact layer;

(c) forming a precursor layer on the Se-rich layer by depositing copper, gallium, and indium resulting in a first interim structure;

(d) selenizing the first interim structure, thereby forming Cu/Se, Ga/Se or CIGS compounds along the interface between the back contact layer and the precursor layer and resulting in a second interim structure; and

(e) selenizing the second interim structure, thereby converting the precursor layer into a CIGS absorber layer on the back contact layer.

13. The method of claim 12 , wherein the step (e) further includes sulfurizing the second interim structure concurrently with the selenizing step.

14. The method of claim 12 , wherein the forming of the Se-rich layer comprises depositing a film of Se.

15. The method of claim 12 , wherein the forming of the Se-rich layer comprises depositing a film of MoSe compound.

16. The method of claim 12 , wherein the forming of the Se-rich layer comprises depositing a film of InSe compound.

17. The method of claim 12 , wherein the forming of the Se-rich layer comprises depositing a film of CuSe compound.

18. The method of claim 12 , wherein the forming of the Se-rich layer comprises depositing a film of GaSe compound.

19. The method of claim 12 , wherein the CIGS absorber layer has an Se concentration of 30 to 60 atomic % along its interface with the back contact layer.

20. The method of claim 12 , wherein the second interim structure is selenized in H 2 Se.

Assignments (3)
MERGER Recorded Jun 16, 2016
From: TSMC SOLAR LTD.
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 039050/0299 →
CORRECTIVE ASSIGNMENT TO CORRECT THE LAST NAME OF THE THIRD INVENTOR, LI-HUAN CHU, PREVIOUSLY RECORDED ON REEL 028040 FRAME 0231. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT OF RIGHTS TO TSMC SOLAR LTD.. Recorded Sep 7, 2012
From: YANG, HSUAN-SHENG; LEE, WEN-CHIN; CHU, LI-HUAN
To: TSMC SOLAR LTD.
Reel/Frame 028920/0869 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 13, 2012
From: YANG, HSUAN-SHENG; LEE, WEN-CHIN; ZHU, LI-HUAN
To: TSMC SOLAR LTD.
Reel/Frame 028040/0231 →
Continuity (1)
Related Publication 20130269778A1 · Oct 17, 2013