Optical displacement measurement device with optimization of the protective film
View Patent ↗An optical displacement measurement device in which variations in interference light by stray light are suppressed to improve interpolation accuracy and detection accuracy. The surface of diffraction grating 11 is coated with protective layer 12 of thickness L and refractive index n. The protective layer has thickness L such that, with angle θ between a line normal to the protective layer and an incident light beam and an angle θ′ between diffracted light generated by diffraction grating and reflected by boundary surface of protective layer to become stray light to be re-incident on diffraction grating and a line normal to diffraction grating, interference light is of an intensity of interference such that an optical path difference between stray light and light interfering with stray light represented by Δ =2 L ( n /cos θ′+tan θ′·sin θ) will amount to not higher than 2 % of intensity of interference of interference light with optical path length difference Δ =0.
1. An optical displacement measurement device including a multi-mode semiconductor laser light source oscillating at a plurality of frequencies, and
a diffraction grating moved relative to the multi-mode semiconductor laser light source; in which
the laser light radiated from the multi-mode semiconductor laser light source via the diffraction grating and diffracted by the diffraction grating is made to interfere and measurement is made of the amount of movement of the diffraction grating; wherein the device further comprises
a transparent protective layer of a refractive index n and a thickness L; the transparent protective layer being formed to cover a surface on which the diffraction grating is formed; wherein
an angle θ between a line normal to the protective layer and an incident light beam and an angle θ′ between diffracted light generated by the diffraction grating and reflected by a boundary surface of the protective layer to become stray light to be re-incident on the diffraction grating and a line normal to the diffraction grating, the protective layer has a range of thickness L such that, the interference signal intensity for an optical path difference between the stray light and light interfering with the stray light represented by Δ=2L(n/cos θ′+tan θ′·sin θ) will amount to not higher than 2% of the interference signal intensity for the optical path length difference Δ=0.