IP Library Granted Patent US 8,921,733
Granted Patent B2
US 8,921,733 · App. 13/446,879 · Granted Dec 30, 2014

Methods and systems for trimming circuits

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Quick Facts
Patent No.
US 8,921,733
App. No.
13/446,879
Granted
Dec 30, 2014
Kind
B2
Abstract

Removing material from the surface of a first circuit comprises generating a first laser pulse using a pulse generator; targeting a spot on the first circuit using a focusing component; delivering the first laser pulse to the spot on the first circuit, the first circuit including a digital component; ablating material from the spot using the first laser pulse without changing a state of the digital component; testing performance of the first circuit, the testing being performed without reinitializing the circuit between the steps of ablating material and testing performance. Targeting the spot on the first circuit comprises generating a second laser pulse using a pulse generator; delivering a second laser pulse to a sacrificial piece of material; detecting the position of the ablation caused by the second laser pulse with a vision system that forms an image; and using this image to guide the first laser to the spot.

Claims (46)

1. A method of removing material from the surface of a first circuit, the method comprising:

generating a first laser pulse using a pulse generator;

targeting a spot on the first circuit using a focusing component;

delivering the first laser pulse to the spot on the first circuit, the first circuit including a digital component;

ablating material from the spot using the first laser pulse without changing a state of the digital component by using the first laser pulse having a wavelength in a near-infrared region and a duration equal or shorter than sub-nanosecond; and

testing performance of the first circuit following the step of ablating material, the testing being performed without reinitializing the circuit between the steps of ablating material and testing performance,

targeting the spot on the first circuit comprises:

generating a second laser pulse using a pulse generator;

delivering a second laser pulse to a sacrificial piece of material;

detecting the position of the ablation caused by the second laser pulse with a vision system that forms an image; and

using this image to guide the first laser to the spot.

2. The method of claim 1 , further comprising sensing a composition of the material ablated from the spot.

3. The method of claim 1 , wherein the first laser pulse has a wavelength greater than 1100 nanometers and a duration of less than 10 picoseconds.

4. The method of claim 1 , wherein the first laser pulse has a wavelength greater than 1350 nanometers.

5. The method of claim 1 , wherein the first laser pulse is delivered as a member of a train of pulses having a repetition rate of at least 1 kHz.

6. The method of claim 1 , wherein an area from which the material is ablated has a diameter less than a diameter of a diffraction limited focal spot of the first laser pulse.

7. The method of claim 1 , wherein ablating the material comprises generating at least 5000 laser pulses including the first laser pulse.

8. The method of claim 1 , wherein ablating the material comprises generating at least 500 laser pulses.

9. The method of claim 1 , further comprising ablating material from another spot in parallel with the step of ablating material from the spot.

10. The method of claim 1 , further including generating a second laser pulse and using the second laser pulse to trim a second circuit in parallel with the first circuit.

11. The method of claim 1 , further including ablating material from a second circuit using a second laser pulse and testing performance of the second circuit, in parallel with ablating material from the spot using the first laser pulse and testing performance of the first circuit.

12. The method of claim 1 , wherein the step of generating a first laser pulse includes compressing the first laser pulse using an optical fiber.

13. The method of claim 1 , wherein the step of generating a first laser pulse includes amplifying the first laser pulse using an optical fiber.

14. A method of removing material from the surface of a first circuit, the method comprising:

generating a first laser pulse using a pulse generator;

targeting a spot on the first circuit using a focusing component;

delivering the first laser pulse to the spot on the first circuit, the first circuit including a digital component;

ablating material from the spot using the first laser pulse without changing a state of the digital component by using the first laser pulse having a wavelength in a near-infrared region and a duration equal or shorter than sub-nanosecond; and

testing performance of the first circuit following the step of ablating material, the testing being performed without reinitializing the circuit between the steps of ablating material and testing performance,

targeting the spot on the first circuit comprises:

generating a second laser pulse using a pulse generator;

delivering a second laser pulse to a sacrificial piece of material;

aligning a visible alignment beam to identify the location of the ablation caused by the second laser pulse; and

using the alignment beam to guide the first laser to the spot.

15. The method of claim 14 , further comprising sensing a composition of the material ablated from the spot.

16. The method of claim 14 , wherein the first laser pulse has a wavelength greater than 1100 nanometers and a duration of less than 10 picoseconds.

17. The method of claim 14 , wherein the first laser pulse has a wavelength greater than 1350 nanometers.

18. The method of claim 14 , wherein the first laser pulse is delivered as a member of a train of pulses having a repetition rate of at least 1 kHz.

19. The method of claim 14 , wherein an area from which the material is ablated has a diameter less than a diameter of a diffraction limited focal spot of the first laser pulse.

20. The method of claim 14 , wherein ablating the material comprises generating at least 5000 laser pulses including the first laser pulse.

21. The method of claim 14 , wherein ablating the material comprises generating at least 500 laser pulses.

22. The method of claim 14 , further comprising ablating material from another spot in parallel with the step of ablating material from the spot.

23. The method of claim 14 , further including generating a second laser pulse and using the second laser pulse to trim a second circuit in parallel with the first circuit.

24. The method of claim 14 , further including ablating material from a second circuit using a second laser pulse and testing performance of the second circuit, in parallel with ablating material from the spot using the first laser pulse and testing performance of the first circuit.

25. The method of claim 14 , wherein the step of generating a first laser pulse includes compressing the first laser pulse using an optical fiber.

26. The method of claim 14 , wherein the step of generating a first laser pulse includes amplifying the first laser pulse using an optical fiber.

Assignments (5)
PATENT RELEASE AND REASSIGNMENT - RELEASE OF REEL/FRAME 040575/0001 Recorded Jul 1, 2022
From: BARCLAYS BANK PLC, AS COLLATERAL AGENT
To: COHERENT, INC.
Reel/Frame 060562/0650 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Nov 7, 2016
From: COHERENT, INC.
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 040575/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 14, 2015
From: RAYDIANCE, INC.
To: RAYD, LLC
Reel/Frame 036557/0164 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 14, 2015
From: RAYD, LLC
To: COHERENT, INC.
Reel/Frame 036557/0196 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 26, 2012
From: GAUDIOSI, DAVID; VAISSIE, LAURENT
To: RAYDIANCE, INC.
Reel/Frame 028646/0027 →