Substrate treating apparatus and substrate treating method
An etchant is stored in a treating tank; a glass substrate is transported with transport rollers into the treating tank; the etchant is discharged from below the substrate to raise the substrate to a position above the transport rollers and below the surface of the etchant; the discharge of the etching liquid is stopped and the glass substrate is lowered to a position for contacting the transport rollers; the etchant is drained from the treating tank; and the glass substrate is unloaded with the transport rollers out of the treating tank. The disclosed method and apparatus can treat both front and back surfaces of the substrate uniformly.
1. A substrate treating apparatus for immersing and treating a rectangular substrate in a treating liquid, comprising:
a treating tank for treating the substrate; transport rollers arranged in the treating tank for horizontally transporting the substrate;
a supplying device for supplying a treating liquid into the treating tank from a storage tank storing the treating liquid;
a draining device for draining the treating liquid from the treating tank to the storage tank;
a liquid level adjusting mechanism for setting a level of the treating liquid in the treating tank at a position above the transport rollers;
a treating liquid discharge device for discharging the treating liquid from below the transport rollers, with the substrate immersed in the treating liquid stored in the treating tank, thereby to raise the substrate to a position spaced above the transport rollers; and
anti-surfacing members for preventing the substrate from rising up to said level of the treating liquid stored in the treating tank,
wherein the anti-surfacing members have inclined surfaces facing downward toward said transport rollers, said inclined surfaces being arranged in positions for contacting a pair of edges of the substrate to block said substrate from rising upward toward said level of the treating liquid.
2. The substrate treating apparatus according to claim 1 , wherein the anti-surfacing members have a truncated cone shape with a vertically extending axis and an outer diameter gradually enlarging upward, and are arranged in the positions for contacting the edges of the substrate raised to the position above the transport rollers by the treating liquid discharge device.
3. The substrate treating apparatus according to claim 1 , wherein each of the transport rollers has a pair of contact portions for contacting only a pair of edges of the substrate extending in a transport direction of the substrate transported by the transport rollers, and so rotates on a horizontal axis as to transport the substrate horizontally in a direction perpendicular to said horizontal axis.
4. The substrate treating apparatus according to claim 3 , wherein each of the contact portions includes a plurality of roll-like elements arranged coaxially about an axis extending horizontally and perpendicular to the transport direction of the glass substrate transported by the transport rollers, the roll-like elements having diameters decreasing toward a center of the substrate, and increasing outward of the substrate.
5. The substrate treating apparatus according to claim 3 , wherein the contact portions are arranged coaxially about an axis extending horizontally and perpendicular to the transport direction of the glass substrate transported by the transport rollers, each of the contact portions having a truncated cone shape with a smaller diameter at an end thereof close to a center of the glass substrate and a larger diameter at the other end outward of the substrate.
6. The substrate treating apparatus according to claim 1 , further comprising a plurality of guide rollers rotatable about vertical axes and spaced apart from each other by a distance corresponding to a distance between a pair of edges extending in a transport direction of the substrate transported by the transport rollers.
7. The substrate treating apparatus according to claim 6 , wherein the guide rollers are rotatable synchronously with a transportation velocity of the glass substrate.
8. The substrate treating apparatus according to claim 7 , wherein each of the guide rollers has a flange disposed above upper ends of the transport rollers and below a surface of the treating liquid stored in the treating tank.
9. The substrate treating apparatus according to claim 1 , further comprising a plurality of guide members spaced apart from each other by a distance larger than a distance between a pair of edges extending in a transport direction of the substrate transported by the transport rollers, for contacting the pair of edges; and
treating liquid squirters for squirting the treating liquid in a direction perpendicular to the transport direction of the substrate transported by the transport rollers, whereby, when the substrate is raised to the position above the transport rollers by the treating liquid discharge device, the substrate is moved in a direction to place one of the edges thereof in contact with the guide members.
10. The substrate treating apparatus according to claim 1 , wherein the treating liquid is an etchant for etching the substrate.
11. The substrate treating apparatus according to claim 1 , wherein each of the transport rollers has a pair of contact portions arranged for contacting only a pair of edges of said rectangular substrate which are disposed on opposite sides of said rectangular substrate and which extend in a transport direction of the substrate transported by the transport rollers, and so rotates on a horizontal axis as to transport the substrate horizontally in a direction perpendicular to said horizontal axis.