Crystallization apparatus, crystallization method, organic light-emitting display apparatus and method of manufacturing organic light-emitting display apparatus
View Patent ↗A crystallization apparatus for crystallizing a semiconductor layer formed on a substrate, the crystallization apparatus including: a laser generator, which generates a laser beam, and a stage on which the substrate is mounted, where the semiconductor layer is divided into a plurality of crystallization areas and a plurality of non-crystallization areas, and the laser beam is radiated onto the crystallization areas a plurality of times to crystallize the crystallization areas, where the laser beam is radiated onto different positions of the same crystallization area a plurality of times.
1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
mounting a substrate on a stage, wherein a semiconductor layer that is divided into a plurality of crystallization areas and a plurality of non-crystallization areas is formed on a surface of the substrate; and
radiating a laser beam onto the crystallization areas a plurality of times,
wherein the radiating of the laser beam comprises sequentially radiating the laser beam onto the crystallization areas and then sequentially radiating the laser beam onto the crystallization areas by changing a position of the laser beam,
wherein the organic light-emitting display apparatus comprises a plurality of pixels having channel regions, storage regions, and emission regions, respectively, and
the performing of the crystallization comprises crystallizing only the channel regions and the storage regions.
2. The method of claim 1 , wherein the crystallization areas and the non-crystallization areas are repeatedly divided.
3. The method of claim 1 , wherein the laser beam is a line beam having a major axis and a minor axis.
4. The method of claim 3 , wherein the laser beam is sequentially radiated onto the crystallization areas while being moved in the minor axis direction.
5. The method of claim 3 , wherein the crystallization areas are arranged in parallel, and the radiating of the laser beam comprises sequentially radiating a first laser beam onto the crystallization areas and then sequentially radiating a second laser beam onto the crystallization areas.
6. The method of claim 5 , wherein the second laser beam is moved more in the major axis direction of the first laser beam than the first laser beam to be radiated onto the crystallization areas.
7. The method of claim 1 , wherein the laser beam is a pulse laser.
8. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
mounting a substrate on a stage, wherein the semiconductor layer is divided into a plurality of crystallization areas and a plurality of non-crystallization areas; and
radiating a laser beam onto the crystallization areas a plurality of times,
wherein the radiating of the laser beam comprises sequentially radiating the laser beam onto the crystallization areas and then sequentially radiating the laser beam onto the crystallization areas by changing a profile of the laser beam,
wherein the organic light-emitting display apparatus comprises a plurality of pixels having channel regions, storage regions, and emission regions, respectively, and
the performing of the crystallization comprises crystallizing only the channel regions and the storage regions.
9. The method of claim 8 , wherein the crystallization areas are arranged in parallel, and the radiating of the laser beam comprises sequentially radiating a first laser beam onto the crystallization areas and then sequentially radiating a second laser beam onto the crystallization areas.
10. The method of claim 9 , wherein the first laser beam and the second laser beam have different profiles.