IP Library Granted Patent US 9,064,781
Granted Patent B2
US 9,064,781 · App. 13/456,886 · Granted Jun 23, 2015

Package 3D interconnection and method of making same

Inventors: Sam Ziqun Zhao (Irvine, CA); Rezaur Rahman Khan (Rancho Santa Margarita, CA)
Assignee: Broadcom Corporation
H01L25/162H01L2224/32145H01L2224/32225H01L2224/97H01L23/3128H01L23/315H01L23/49816H01L23/552H01L24/16H01L2924/15311H01L2924/15331H01L2224/16227H01L2224/48227H01L21/56H01L2224/73265H01L2924/3511H01L25/105H01L2225/1023H01L2225/1058H01L2924/3011H01L2224/16225H01L2924/3025
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,064,781
App. No.
13/456,886
Granted
Jun 23, 2015
Kind
B2
Abstract

A method of manufacturing an integrated circuit (IC) package is provided. The method includes stacking an interposer substrate and a device structure, the interposer substrate having a first plurality of contact members formed on a first surface of the interposer substrate and the device structure having a second plurality of contact members that are exposed at a surface of the device structure, and laminating the interposer substrate and the device structure such that the first plurality of contact members are physically and electrically coupled to the second plurality of contact members. The interposer substrate is configured such that a circuit member mounted to a second surface of the interposer substrate is electrically coupled to the second plurality of contact members.

Claims (56)

1. A method of manufacturing an integrated circuit (IC) package, comprising:

coupling a die to a first surface of a first substrate to form a device structure;

coupling a first plurality of solder balls to a first surface of an interposer substrate;

coupling a second plurality of solder balls to the first surface of the first substrate;

encapsulating the second plurality of solder balls with a molding compound to form a molding layer;

applying film to the molding compound or the interposer substrate to couple the molding layer to the interposer substrate;

stacking the interposer substrate and the device structure, wherein after the stacking, ones of the first plurality of solder balls physically contact respective ones of the second plurality of solder balls; and

laminating the interposer substrate and the device structure.

2. The method of claim 1 , further comprising:

before the stacking, coupling a plurality of contact members to the second plurality of solder balls.

3. The method of claim 2 , wherein the plurality of contact members comprises a third plurality of solder balls.

4. The method of claim 1 , further comprising:

before the stacking, applying a non-conductive paste on a surface of the device structure.

5. The method of claim 1 , further comprising:

coupling the first plurality of solder balls to the first surface of the interposer substrate.

6. The method of claim 5 , wherein the interposer substrate is included in a block of interposers substrate, the method further comprising:

singulating the interposer substrate.

7. The method of claim 1 , wherein stacking comprises:

stacking the device structure on top of the interposer substrate.

8. The method of claim 1 , wherein the device structure is included in a strip of device structures, the method further comprising:

before the laminating, clamping the strip of device structures.

9. The method of claim 1 , wherein the device structure is included in a strip of device structures, the method further comprising:

before the laminating, placing a weight on the strip of device structures.

10. The method of claim 9 , wherein laminating comprises heating the device structure and the interposer, wherein a time during which the device structure and interposer are heated is adjusted based on the presence of the weight.

11. The method of claim 1 , wherein the device structure is included in a strip of device structures, the method further comprising:

after the laminating, singulating the device structure.

12. The method of claim 1 , wherein laminating comprises:

inserting the interposer substrate and the device structure between heated plates.

13. The method of claim 12 , wherein laminating further comprises:

applying pressure to the interposer substrate and the device structure through the heated plates.

14. The method of claim 1 , further comprising:

before the stacking, applying a flux material to a surface of the device structure.

15. The method of claim 1 , wherein after the stacking, the first surface of the interposer substrate and an outer surface of the device structure is separated by a gap.

16. An integrated circuit (IC) package, comprising:

a first substrate having first and second opposing surfaces;

a die attached to the first surface of the first substrate;

a first plurality of solder balls attached to the first surface of the first substrate;

a second substrate having opposing first and second surfaces;

a second plurality of solder balls attached to the first surface of the second substrate, the second plurality of solder balls contacting respective ones of the first plurality of solder balls;

a molding layer comprising a mold compound that encapsulates the second plurality of solder balls; and

a film layer coupling the molding layer to the interposer substrate.

17. The IC package of claim 16 , wherein the first substrate is electrically coupled to the second substrate through an outer periphery of the first plurality of solder balls such that an electrical cage is formed around the die.

18. The IC package of claim 16 , wherein the first substrate is electrically coupled to the second substrate through a center of the first plurality of solder balls such that an electrical cage is formed around the die.

19. A method of manufacturing an integrated circuit (IC) package, comprising:

coupling a die to a first surface of a first substrate to form a device structure;

coupling a first plurality of solder balls to a first surface of an interposer substrate;

coupling a second plurality of solder balls to the first surface of the first substrate;

encapsulating the second plurality of solder balls with a molding compound to form a molding layer;

exposing respective surfaces of the second plurality of solder balls in the molding compound;

applying film to the molding compound or the interposer substrate to couple the molding compound to the interposer substrate; and

stacking the interposer substrate and the device structure, wherein after the stacking, ones of the first plurality of solder balls physically contact the respective surfaces of respective ones of the second plurality of solder balls.

20. The method of claim 19 , wherein the film fills a gap between the interposer substrate and the molding layer.

21. The method of claim 19 , wherein the exposing comprises:

forming a plurality of cavities in the molding compound to expose the respective surfaces of the second plurality of solder balls.

22. The method of claim 19 , wherein the exposing comprises:

removing a top layer of the molding compound to expose the respective surfaces of the second plurality of solder balls.

Assignments (7)
CORRECTIVE ASSIGNMENT TO CORRECT THE PATENT NUMBER 9,385,856 TO 9,385,756 PREVIOUSLY RECORDED AT REEL: 47349 FRAME: 001. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER. Recorded Mar 22, 2019
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 051144/0648 →
CORRECTIVE ASSIGNMENT TO CORRECT THE EFFECTIVE DATE PREVIOUSLY RECORDED ON REEL 047229 FRAME 0408. ASSIGNOR(S) HEREBY CONFIRMS THE THE EFFECTIVE DATE IS 09/05/2018. Recorded Oct 29, 2018
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 047349/0001 →
MERGER Recorded Oct 4, 2018
From: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 047229/0408 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS Recorded Feb 3, 2017
From: BANK OF AMERICA, N.A., AS COLLATERAL AGENT
To: BROADCOM CORPORATION
Reel/Frame 041712/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 1, 2017
From: BROADCOM CORPORATION
To: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
Reel/Frame 041706/0001 →
PATENT SECURITY AGREEMENT Recorded Feb 11, 2016
From: BROADCOM CORPORATION
To: BANK OF AMERICA, N.A., AS COLLATERAL AGENT
Reel/Frame 037806/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 26, 2012
From: ZHAO, SAM ZIQUN; KHAN, REZAUR RAHMAN
To: BROADCOM CORPORATION
Reel/Frame 028114/0008 →
Continuity (3)
Continuation In Part 13174066 · Jun 30, 2011
Provisional Application 61448880 · Mar 3, 2011
Related Publication 20120225522A1 · Sep 6, 2012