Method for providing a piezoelectric multilayer
View Patent ↗A method for fabricating a piezoelectric multilayer are described. The method includes providing conductive layers. Alternating conductive layers are electrically connected. A first plurality of alternating conductive layers is electrically isolated from a second plurality of alternating conductive layers. Piezoelectric layers are interleaved with the conductive layers. Apertures are provided in the piezoelectric layers. A first conductive plug electrically connects the first plurality of alternating conductive layers, includes a first plurality of segments, and is in apertures in the piezoelectric layers. Each of the first plurality of segments extends through one of the piezoelectric layers. A second conductive plug electrically connects the second plurality of alternating conductive layers, includes a second plurality of segments, and is in a second portion of the plurality of apertures. Each of the second plurality of segments extends through one of the plurality of piezoelectric layers.
1. A method for fabricating a piezoelectric multilayer comprising:
depositing a first conductive layer on a substrate;
depositing a first piezoelectric layer on the first conductive layer;
removing a portion of the first piezoelectric layer to provide a first aperture therein, the first aperture exposing a portion of the first conductive layer;
providing a portion of a first conductive plug within the first aperture, the first conductive plug being electrically connected to the first conductive layer;
depositing a second conductive layer on the first piezoelectric layer;
removing a portion of the second conductive layer to provide a second aperture therein, the second aperture exposing the first conductive plug and allowing the second conductive layer to be electrically insulated from the first conductive plug;
depositing a second piezoelectric layer covering the first conductive plug and the second conductive layer;
removing a portion of the second piezoelectric layer to provide a third aperture and a fourth aperture therein, the third aperture exposing the first conductive plug, the fourth aperture exposing an additional portion of the second conductive layer distal from the first conductive plug;
providing a second portion of the first conductive plug in the third aperture and a first portion of a second conductive plug in the fourth aperture;
depositing a third conductive layer electrically coupled to the first conductive plug;
removing a portion of the third conductive layer to form fifth aperture therein, the fifth aperture exposing the second conductive plug and allowing the third conductive layer to be insulated from the second conductive plug.
2. The method of claim 1 further comprising:
depositing a third piezoelectric layer covering the first conductive plug and the third conductive layer;
removing a portion of the third piezoelectric layer to provide a pair of apertures exposing the first conductive plug and the second conductive plug;
providing a portion of the first conductive plug and the second conductive plug in the pair of apertures;
depositing a fourth conductive layer electrically coupled to the second conductive plug.
3. The method of claim 2 further comprising:
removing a portion of the fourth conductive layer to form a sixth aperture therein, the sixth aperture exposing the first conductive plug and allowing the fourth conductive layer to be insulated from the first conductive plug.
4. The method of claim 3 further comprising:
repeating steps of forming piezoelectric and conductive layers further comprising: depositing a fourth piezoelectric layer, removing the portion of the fourth piezoelectric layer to provide a second pair of apertures to expose the first conductive plug and second conductive plug, providing the portion of the first conductive plug and the portion of the second conductive plug in the second pair of apertures, depositing a fifth conductive layer, removing a portion of the fifth conductive layer to form a seventh aperture, depositing a fifth piezoelectric layer, removing a portion of the fifth piezoelectric layer to provide a third pair of apertures to expose the first conductive plug and second conductive plug, providing the portion of the first conductive plug and the second conductive plug in the third pair of apertures, and depositing a sixth conductive layer electrically coupled to the second conductive plug.
5. The method of claim 1 further comprising:
providing an insulating layer between the substrate and the first conductive layer.
6. The method of claim 1 further comprising:
annealing each of the first piezoelectric layer and the second piezoelectric layer after deposition of the first and second piezoelectric layers.
7. The method of claim 1 wherein the step of removing the portion of the first piezoelectric layer further includes:
providing a mask exposing the portion of the first piezoelectric layer; and
reactive ion etching the portion of the first piezoelectric layer.
8. The method of claim 7 wherein the step of providing the portion of the first conductive plug further includes:
depositing a seed layer;
electroplating a conductive material, the conductive material filling the first aperture; and
planarizing the first piezoelectric layer.
9. The method of claim 1 wherein the step of removing the portion of the second piezoelectric layer further includes:
providing a mask exposing the portion of the second piezoelectric layer; and
reactive ion etching the portion of the second piezoelectric layer.
10. The method of claim 9 wherein the step of providing the portion of the first conductive plug and the portion of the second conductive plug further includes:
depositing a seed layer covering at least the third aperture and the fourth aperture;
electroplating a conductive material, the conductive material filling the third aperture and the fourth aperture; and
planarizing the second piezoelectric layer.
11. The method of claim 1 further comprising:
depositing an insulating layer on a top conductive layer;
removing a portion of the insulating layer, exposing the first conductive plug and the second conductive plug;
providing interconnects to the first conductive plug and the second conductive plug.
12. The method of claim 1 further comprising:
providing a plurality of bottom electrical contacts.
13. The method of claim 12 wherein the step of providing the bottom electrical contacts further includes:
providing an insulating layer on the substrate;
removing a portion of the substrate and the insulating layer to provide a plurality of depressions in the substrate; and
providing the plurality of bottom contacts in the plurality of depressions.
14. The method of claim 13 further comprising:
removing the substrate.